{"currentpage":1,"firstResult":0,"maxresult":10,"pagecode":5,"pageindex":{"endPagecode":5,"startPagecode":1},"records":[{"abstractinfo":"目的:研究硅片经雾化施液抛光技术加工后存在的位错缺陷。方法应用化学腐蚀法、光学方法分析硅片不同部位的位错腐蚀形貌、位错密度及其分布,通过单因素实验研究雾化参数对位错形貌和位错密度的影响规律。在相同的工艺参数下,和传统抛光进行对比实验。结果雾化抛光硅片的平均位错密度为1.2×104/cm2,边沿处的位错密度小于其他区域。在相同的工艺参数下,雾化施液CMP的抛光液消耗量约为传统CMP的1/10,但硅片的位错腐蚀形貌和位错密度明显好于传统抛光,且蚀坑分布均匀分散,没有出现位错排等严重缺陷。通过增大雾化器的出雾量能有效改善硅片表层的位错缺陷。结论相对于传统抛光,雾化施液抛光技术能更加高效地去除硅片的位错缺陷。","authors":[{"authorName":"壮筱凯","id":"9ab4d71a-530f-44e4-8cfc-6334902b6c31","originalAuthorName":"壮筱凯"},{"authorName":"李庆忠","id":"cd98ac45-35a7-404f-b38a-325911e19741","originalAuthorName":"李庆忠"}],"doi":"10.16490/j.cnki.issn.1001-3660.2015.05.024","fpage":"129","id":"d66d3758-b985-42b9-9200-0bbb8a773e48","issue":"5","journal":{"abbrevTitle":"BMJS","coverImgSrc":"journal/img/cover/BMJS.jpg","id":"3","issnPpub":"1001-3660","publisherId":"BMJS","title":"表面技术 "},"keywords":[{"id":"4c646564-94fd-457a-b51f-aaa3dd10d670","keyword":"雾化施液","originalKeyword":"雾化施液"},{"id":"2fb1ee8b-8a76-4962-9fef-cce3663f2b33","keyword":"硅片","originalKeyword":"硅片"},{"id":"924ac415-416a-43f4-8cf5-65bc3c96f445","keyword":"位错腐蚀坑","originalKeyword":"位错腐蚀坑"},{"id":"27584d23-3331-4a4d-826b-52f8a2975395","keyword":"传统抛光","originalKeyword":"传统抛光"},{"id":"34d1daf6-b786-4425-a2db-dc96dc266aee","keyword":"雾化参数","originalKeyword":"雾化参数"}],"language":"zh","publisherId":"bmjs201505024","title":"雾化施液抛光硅片位错的化学腐蚀形貌分析","volume":"","year":"2015"},{"abstractinfo":"用Everson腐蚀剂对CdZnTe晶体(111)B和(211)B面上的位错进行了腐蚀和观察,发现(111)B面上的腐蚀坑密度(EPD)值明显高于(211)B面上的EPD值,(111)B面上的EPD值与双晶衍射半峰宽有明显的依赖关系,(111)B面上的FWHM值随EPD的增加而增加.而(211)B面上的EPD则与材料的双晶衍射半峰宽无关.研究结果表明,用Everson腐蚀剂得到的EPD参数依赖于材料的晶体取向,在两种常用的晶体学取向中,(111)B面上得到的EPD能较为正确的反映CdZnTe材料中的位错密度.","authors":[{"authorName":"顾惠明","id":"22365c16-376a-4f1e-96db-ec56ac263d6b","originalAuthorName":"顾惠明"},{"authorName":"杨建荣","id":"4c74ceba-8c1f-48b9-87ed-f89b142ae3bc","originalAuthorName":"杨建荣"},{"authorName":"陈新强","id":"2fd290e5-1ec7-459b-b4aa-d0147bb11855","originalAuthorName":"陈新强"},{"authorName":"何力","id":"1e42b070-c7ba-4a76-bebc-458b55fc6b15","originalAuthorName":"何力"}],"doi":"10.3969/j.issn.1000-985X.1999.02.012","fpage":"172","id":"0142735d-6635-4999-ada7-7be7e9b522f0","issue":"2","journal":{"abbrevTitle":"RGJTXB","coverImgSrc":"journal/img/cover/RGJTXB.jpg","id":"57","issnPpub":"1000-985X","publisherId":"RGJTXB","title":"人工晶体学报"},"keywords":[{"id":"b56d6d6f-931c-44b6-9314-79ebf702c52d","keyword":"CdZnTe","originalKeyword":"CdZnTe"},{"id":"dc800d72-dcf4-45d3-ab07-6870e48b44bc","keyword":"位错","originalKeyword":"位错"},{"id":"14116e65-4bec-46cb-8a99-3f0b509dfb92","keyword":"腐蚀法","originalKeyword":"腐蚀法"},{"id":"f4b937a8-0b84-4d8e-b99b-d6ab69793805","keyword":"布里奇曼法","originalKeyword":"布里奇曼法"},{"id":"0683d7d2-8d1d-4b7b-b7a7-368ff4f7ced6","keyword":"衬底材料","originalKeyword":"衬底材料"}],"language":"zh","publisherId":"rgjtxb98199902012","title":"CdZnTe材料(111)B和(211)B面上位错腐蚀坑密度的差异","volume":"28","year":"1999"},{"abstractinfo":"实验目的在于解决GaN外延层中六方形腐蚀坑起源问题存在的分歧,并利用腐蚀法准确地估计GaN的位错密度.大量对熔融KOH腐蚀GaN过程中表面形貌的演化以及温度和时间对腐蚀结果影响的实验结果表明,位错类型与腐蚀坑三维形状相对应,而与腐蚀坑大小无关,极性是GaN不同种类位错的腐蚀坑具有不同形状的决定性因素.使所有缺陷都显示出来所需的腐蚀温度和时间呈反比关系.腐蚀法估算GaN位错密度的准确性取决于优化的腐蚀条件和合理的微观观测方法.","authors":[{"authorName":"高志远","id":"caa63ffd-83a1-4af4-999b-f0ddd3613a24","originalAuthorName":"高志远"},{"authorName":"郝跃","id":"ff052e77-4c25-4f45-ac9b-6ae6f6c17b67","originalAuthorName":"郝跃"},{"authorName":"张进城","id":"8d8beee7-5831-4521-9a18-25667d54e1d6","originalAuthorName":"张进城"},{"authorName":"张金凤","id":"93a29aec-e3ea-4821-a3ed-a86022cc3e36","originalAuthorName":"张金凤"},{"authorName":"倪金玉","id":"4d04134c-6f67-48e1-b169-4605d7f30568","originalAuthorName":"倪金玉"}],"doi":"10.3969/j.issn.1007-4252.2008.04.003","fpage":"742","id":"f4481f04-529b-41eb-b019-da24a58d7e50","issue":"4","journal":{"abbrevTitle":"GNCLYQJXB","coverImgSrc":"journal/img/cover/GNCLYQJXB.jpg","id":"34","issnPpub":"1007-4252","publisherId":"GNCLYQJXB","title":"功能材料与器件学报 "},"keywords":[{"id":"49a75e27-a2e9-4277-9491-db4007230e08","keyword":"位错密度","originalKeyword":"位错密度"},{"id":"72514575-ba99-4c13-a6e4-cfc3d06c27ba","keyword":"GaN","originalKeyword":"GaN"},{"id":"54eae27d-6388-41fc-bc6f-f933fc1cdd4b","keyword":"腐蚀坑密度","originalKeyword":"腐蚀坑密度"},{"id":"ea770096-6b47-4ed7-84cd-c3d98985a8c0","keyword":"腐蚀机制","originalKeyword":"腐蚀机制"}],"language":"zh","publisherId":"gnclyqjxb200804003","title":"KOH热湿腐蚀法准确估算GaN的位错密度","volume":"14","year":"2008"},{"abstractinfo":"利用扫描电镜(SEM)及能谱(EDS)技术研究激光晶体缺陷,给出了经腐蚀过后Nd: YAG晶体表面位错蚀坑的清晰图片和元素分布定量信息,同时进行了对比实验,并对实验结果进行了分析.结果表明:Nd: YAG晶体位错腐蚀坑呈三角锥状,腐蚀坑杂质元素分布较多,主要元素含量偏离晶体完整区成份;位错腐蚀坑稀疏区与密堆区元素分布及含量不同.并讨论了位错成因.","authors":[{"authorName":"权纪亮","id":"08d273fe-e3e3-45f4-bc53-ac172d850140","originalAuthorName":"权纪亮"},{"authorName":"谢致薇","id":"72b48e03-feb3-465d-8f22-7ed8d17c470b","originalAuthorName":"谢致薇"},{"authorName":"杨元政","id":"f4e7e0a2-985d-4f13-9a32-17530f27dd36","originalAuthorName":"杨元政"},{"authorName":"陈先朝","id":"995c41e0-f74f-4971-83bb-ad86184631c7","originalAuthorName":"陈先朝"},{"authorName":"李文涛","id":"8aa78c4b-f10a-4b2e-85a8-01ddcfeb02e2","originalAuthorName":"李文涛"},{"authorName":"刘了","id":"34725471-7405-4705-9757-1597ad6c6227","originalAuthorName":"刘了"},{"authorName":"武南平","id":"c5ee52ac-2f6b-4f40-b19e-4d9eb4db027f","originalAuthorName":"武南平"}],"doi":"","fpage":"1004","id":"f753e939-0caf-4082-a051-c3d83c08dd1b","issue":"4","journal":{"abbrevTitle":"RGJTXB","coverImgSrc":"journal/img/cover/RGJTXB.jpg","id":"57","issnPpub":"1000-985X","publisherId":"RGJTXB","title":"人工晶体学报"},"keywords":[{"id":"3fa6932d-2a9c-4456-866c-15ec669440de","keyword":"扫描电镜","originalKeyword":"扫描电镜"},{"id":"27b170d1-4bf1-42b8-aa38-8482bb87d3b2","keyword":"能谱","originalKeyword":"能谱"},{"id":"671afc28-6daf-4191-8ee3-8d16f8361e4c","keyword":"激光晶体","originalKeyword":"激光晶体"},{"id":"183bb641-00b1-48a9-9b48-c4b247284aba","keyword":"位错","originalKeyword":"位错"}],"language":"zh","publisherId":"rgjtxb98200904042","title":"激光晶体位错蚀坑的SEM研究","volume":"38","year":"2009"},{"abstractinfo":"利用扫描电镜电子通道衬度技术(SEM--ECC)和透射电子显微镜(TEM)对[013]取向Cu单\n晶体在空气中和NaCl水溶液中疲劳到饱和的位错结构进行观察. 结果表明: 在0.5mol/L NaCl 水溶液中, 腐蚀疲劳饱和位错结构主要是迷宫和脉络位错结构, 这与空气中的驻留滑移带 (PSBs)和脉络位错结构不同. 腐蚀疲劳饱和位错结构的观察表明, 介质对疲劳位错结构的影响相当于在其它条件都不变的情况下, 增大了疲劳的塑性切应变幅.","authors":[{"authorName":"杨继红","id":"a2a29e7d-13f9-4bec-a825-f6d73eeb9d72","originalAuthorName":"杨继红"},{"authorName":"贾维平","id":"d7f55cfc-7af9-4535-adf8-411872114247","originalAuthorName":"贾维平"},{"authorName":"李守新","id":"861aa1b2-f327-49aa-a716-07c7aedf7b31","originalAuthorName":"李守新"}],"categoryName":"|","doi":"","fpage":"99","id":"870cc576-0b4a-49dd-bd78-8ce5436683f6","issue":"1","journal":{"abbrevTitle":"JSXB","coverImgSrc":"journal/img/cover/JSXB.jpg","id":"48","issnPpub":"0412-1961","publisherId":"JSXB","title":"金属学报"},"keywords":[{"id":"5597a13c-d836-43b6-a42a-449baeea9286","keyword":"Cu单晶体","originalKeyword":"Cu单晶体"},{"id":"53300e1b-14c1-481b-94b0-52f8bad8b6b6","keyword":"corrosion fatigue","originalKeyword":"corrosion fatigue"}],"language":"zh","publisherId":"0412-1961_2004_1_4","title":"[013]取向Cu单晶体在NaCl水溶液中腐蚀疲劳位错结构的观察","volume":"40","year":"2004"},{"abstractinfo":"利用扫描电镜电子通道衬度技术(SEM-ECC)和透射电子显微镜(TEM)对[013]取向Cu单晶体在空气中和NaCl水溶液中疲劳到饱和的位错结构进行观察.结果表明:在0.5 mol/L NaCl水溶液中,腐蚀疲劳饱和位错结构主要是迷宫和脉络位错结构,这与空气中的驻留滑移带(PSBs)和脉络位错结构不同.腐蚀疲劳饱和位错结构的观察表明,介质对疲劳位错结构的影响相当于在其它条件都不变的情况下,增大了疲劳的塑性切应变幅.","authors":[{"authorName":"杨继红","id":"155d6aeb-b040-463e-9ab2-39a05239ef26","originalAuthorName":"杨继红"},{"authorName":"贾维平","id":"1c85ff02-d768-434a-964e-4feda7b211cd","originalAuthorName":"贾维平"},{"authorName":"李守新","id":"a5e1ea52-fbf7-45d8-978b-eacb6fa862c9","originalAuthorName":"李守新"},{"authorName":"柯伟","id":"b086ab9b-ee62-4eba-a239-ca73026c07da","originalAuthorName":"柯伟"}],"doi":"10.3321/j.issn:0412-1961.2004.01.019","fpage":"99","id":"d68b5259-8b22-498b-b769-a4080e2c94cd","issue":"1","journal":{"abbrevTitle":"JSXB","coverImgSrc":"journal/img/cover/JSXB.jpg","id":"48","issnPpub":"0412-1961","publisherId":"JSXB","title":"金属学报"},"keywords":[{"id":"70fde4df-a6be-4382-8073-6c140213e0c6","keyword":"Cu单晶体","originalKeyword":"Cu单晶体"},{"id":"d1dc4048-7831-4959-bc88-b162adc1c1b0","keyword":"腐蚀疲劳","originalKeyword":"腐蚀疲劳"},{"id":"729193c3-3198-4a9e-9aa3-df88cbc1565f","keyword":"位错微结构","originalKeyword":"位错微结构"}],"language":"zh","publisherId":"jsxb200401019","title":"[013]取向Cu单晶体在NaCl水溶液中腐蚀疲劳位错结构的观察","volume":"40","year":"2004"},{"abstractinfo":"通过扫描电镜、扫描探针显微镜和电子背散射衍射仪对改进的Chen法腐蚀液在Hg3In2Te6(111)晶片上形成的腐蚀坑进行了研究.实验发现,腐蚀坑形貌主要有线形、梭形、枣形3种,且后两者的沟槽在(111)面的投影只有3种取向,并互成120°夹角.进一步分析的结果表明,上述蚀坑的形成可由螺位错双交滑移的模型加以解释.","authors":[{"authorName":"罗林","id":"3881960f-fcb8-496b-b098-63491b72669b","originalAuthorName":"罗林"},{"authorName":"介万奇","id":"e6263e11-c1da-4d8c-ac24-861631bf10aa","originalAuthorName":"介万奇"},{"authorName":"孙叶","id":"0b386230-0ac4-48bc-9ef6-7d8105ac80d1","originalAuthorName":"孙叶"},{"authorName":"王涛","id":"3c91a0a6-d69a-4344-9ece-b5d49b47436f","originalAuthorName":"王涛"},{"authorName":"傅莉","id":"2577cca3-73e7-4b8a-9483-d97615f7386c","originalAuthorName":"傅莉"}],"doi":"","fpage":"1853","id":"c0320a1b-7415-4853-8f0d-ef10e97c48b1","issue":"10","journal":{"abbrevTitle":"GNCL","coverImgSrc":"journal/img/cover/GNCL.jpg","id":"33","issnPpub":"1001-9731","publisherId":"GNCL","title":"功能材料"},"keywords":[{"id":"9771c68c-f572-42c0-b81d-24c2ea5936fb","keyword":"碲铟汞","originalKeyword":"碲铟汞"},{"id":"1e4bcb3f-ac54-4ff5-b8b8-d3cee5def6af","keyword":"腐蚀坑","originalKeyword":"腐蚀坑"},{"id":"f2ae46f9-d591-4856-88fd-6b2481366352","keyword":"位错","originalKeyword":"位错"},{"id":"d65a6191-2d2e-4746-a22e-e003f08dde85","keyword":"电子背散射衍射","originalKeyword":"电子背散射衍射"},{"id":"1e18e74d-8a7a-459c-9060-b726e916638e","keyword":"双交滑移","originalKeyword":"双交滑移"}],"language":"zh","publisherId":"gncl201010051","title":"碲铟汞(111)晶面腐蚀坑的研究","volume":"41","year":"2010"},{"abstractinfo":"采用化学腐蚀法研究Nd∶YAG晶体位错.研究发现,腐蚀剂、腐蚀温度以及腐蚀时间对位错的显示都有影响.浓磷酸腐蚀剂在220 ℃下腐蚀20 min时,显示的位错最为清晰.蚀坑形状为菱形,经过计算,位错密度大约为10~3 cm~(-2).同一种腐蚀剂在不同的腐蚀时间所形成的位错蚀坑大小和形貌是不同的.同时发现在样品的边缘有位错塞积群.","authors":[{"authorName":"孙晶","id":"a5f13933-3a83-4876-95ee-1f8967deadb7","originalAuthorName":"孙晶"},{"authorName":"李昌立","id":"4ccabeb0-bd64-47a8-a75d-3e01e53cb0bf","originalAuthorName":"李昌立"},{"authorName":"于文生","id":"061b80c7-c544-4c17-8069-602b4a5b6bf9","originalAuthorName":"于文生"},{"authorName":"李四海","id":"812daab2-c2b2-4681-8e24-7bda70ed80cf","originalAuthorName":"李四海"},{"authorName":"张大龙","id":"eb6963d6-7799-4701-9b1d-d89836e62378","originalAuthorName":"张大龙"},{"authorName":"刘景和","id":"68520266-c068-40e5-af40-aa5f153b2520","originalAuthorName":"刘景和"}],"doi":"","fpage":"1320","id":"ab7468a9-4c1e-4d3a-aff9-6fb4dc6cb3d1","issue":"6","journal":{"abbrevTitle":"RGJTXB","coverImgSrc":"journal/img/cover/RGJTXB.jpg","id":"57","issnPpub":"1000-985X","publisherId":"RGJTXB","title":"人工晶体学报"},"keywords":[{"id":"5f565337-5686-4c2c-bb10-722d63b9ea2a","keyword":"Nd:YAG","originalKeyword":"Nd:YAG"},{"id":"a5878b74-7aef-4d9d-9488-e8f5cfd6144c","keyword":"化学腐蚀","originalKeyword":"化学腐蚀"},{"id":"4898f244-9a0f-4121-8c0c-8ad8a3d69ef4","keyword":"位错","originalKeyword":"位错"}],"language":"zh","publisherId":"rgjtxb98200906005","title":"化学腐蚀法研究Nd:YAG晶体位错","volume":"38","year":"2009"},{"abstractinfo":"研究了A537低合金钢在3.5%NaCl活化体系的低周腐蚀疲劳近表面的微观位错行为,特别是在不同的极化电位条件的位错结构.结果表明,在A537/3.5%NaCl活化体系中,当样品在相同应变幅条件加载直至断裂后,近表面的位错结构在-580mV阳极极化和-1200mV强阴极极化条件,均为墙结构;而在-800mV阴极保护条件下,为胞结构.","authors":[{"authorName":"王俭秋","id":"34a60a56-7cb7-47f8-8a81-ca52259b1fb9","originalAuthorName":"王俭秋"},{"authorName":"李劲","id":"f7011109-9dd3-4389-b276-d3b0fb358ccc","originalAuthorName":"李劲"},{"authorName":"柯伟","id":"29c7b29e-5180-487e-9bd4-de71c62cde92","originalAuthorName":"柯伟"}],"categoryName":"|","doi":"","fpage":"730","id":"2b7da669-0b9c-4b80-93fb-ba0163100054","issue":"7","journal":{"abbrevTitle":"JSXB","coverImgSrc":"journal/img/cover/JSXB.jpg","id":"48","issnPpub":"0412-1961","publisherId":"JSXB","title":"金属学报"},"keywords":[{"id":"569cb523-b859-41ab-9b4b-f6399e31f003","keyword":"A537钢","originalKeyword":"A537钢"},{"id":"755ddb6d-ac73-4d4a-abe4-74652e48be8a","keyword":" low cycle fatigue","originalKeyword":" low cycle fatigue"},{"id":"b4444839-3b37-4855-8cff-f7fe3842ff6e","keyword":" anodic polarization","originalKeyword":" anodic polarization"},{"id":"d2cf5264-dcdd-49ce-9232-e726f847b454","keyword":" cathodic polarization","originalKeyword":" cathodic polarization"},{"id":"5b2561e0-aa1c-4fcf-a5e2-d37825c37e78","keyword":"cathodic protection","originalKeyword":"cathodic protection"},{"id":"dd66a12d-7c65-43f3-82e9-8d0a2ec33698","keyword":" dislocation wall","originalKeyword":" dislocation wall"},{"id":"1d723264-605b-4b2b-b7bc-619b30b84842","keyword":" dislocation cell.","originalKeyword":" dislocation cell."}],"language":"zh","publisherId":"0412-1961_1996_7_3","title":"极化对A537钢低周腐蚀疲劳的近表面微观位错行为的影响","volume":"32","year":"1996"},{"abstractinfo":"阐述了Thomas-Fermi-Dirac-Cheng电子理论的位错形成机制. 通过对系统总能量的分析提出了位错能够存在的判据, 计算给出多种单质材料位错存在的极限尺寸值.","authors":[{"authorName":"程开甲","id":"9875b592-1c07-4edf-8545-85a17f72917e","originalAuthorName":"程开甲"},{"authorName":"程漱玉","id":"16455dd9-cf2a-4ffc-a670-6ddc05a07890","originalAuthorName":"程漱玉"}],"doi":"","fpage":"81","id":"c5a68e38-834c-44b1-9bf9-1d18c35dffe9","issue":"2","journal":{"abbrevTitle":"XYJSCLYGC","coverImgSrc":"journal/img/cover/XYJSCLYGC.jpg","id":"69","issnPpub":"1002-185X","publisherId":"XYJSCLYGC","title":"稀有金属材料与工程"},"keywords":[{"id":"6adb403a-a239-4021-a342-386a28046e41","keyword":"位错","originalKeyword":"位错"},{"id":"38edc98f-54bc-49bf-b851-8027c1cb56ce","keyword":"Thomas-Fermi-Dirac-Cheng","originalKeyword":"Thomas-Fermi-Dirac-Cheng"},{"id":"cd6a8c41-dd59-4b0d-813c-51be6183d5b1","keyword":"极限尺寸","originalKeyword":"极限尺寸"}],"language":"zh","publisherId":"xyjsclygc200202001","title":"论位错的稳定存在","volume":"31","year":"2002"}],"totalpage":2397,"totalrecord":23965}