注入能量对离子注入影响明显,但目前探究注入能量对304不锈钢离子注N层影响报道较少.研究在N剂量相同的情况下,离子注N时不同注入能量(30 ～ 75 keV)对304不锈钢表面改性层的组织及性能的影响.采用离子注入软件SRIM2013模拟离子注入对304不锈钢的注N深度,并采用扫描电镜(SEM)、显微硬度仪、X射线衍射仪(XRD)、万能摩擦磨损试验机对表面改性组织、硬度、相结构、摩擦系数进行测试,并对微观机理进行了分析与讨论.研究表明:在相同剂量下(9.0× 1017 cm-2),在注入能量范围为30～60 keV时,表面生成了γN相.但随着注入能量达到75 keV,304不锈钢表面出现多孔形貌,且硬度、摩擦系数等力学性能下降.经注入能量60 keV注N后,所得注N试样的显微硬度约为基材的1.9倍,摩擦系数有所降低,从基材的0.62下降为注N后的0.32;注入能量60 keV是离子注入的最佳注入能量.
The influence of different implantation energy (30～75 keV) of N-ion implantation with the same N dosage on the structure and per formance of modified layer on the steel surface was studied.The structure,hardness,phase composition and friction factor of modified layer were characterized by scanning electron microscope (SEM),X-ray diffractometer (XRD) and friction wear testing machine.Results showed that under the same dosage (9.0× 1017 cm-2),γN phase was formed on the surface at the implantation energy range of 30～60 keV.However,as the implantation energy increased to 75 keV,the 304 stainless steel presented porous morphology,and the hardness and the mechanical properties such as friction efficiency declined.Moreover,after N-ion implantation under the energy of 60 keV,the micro-hardness of obtained Nimplanted sample was 1.9 times as great as the substrate,and the friction factor reduced from 0.62 to 0.32.Therefore,the optimal energy for improving N-ion implantation was 60 keV.
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