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This study describes the corrosion mechanism of Mo/Nd(16)Fe(71)B(13)/Mo film induced by sodium chloride particles in 80% relative humidity (RH) environment. The deliquescence of sodium chloride particles on the Mo/Nd(16)Fe(71)B(13)/Mo film caused the step by step attacks. Initial loosening of the Mo layer allows permeation of electrolyte into Nd-Fe-B layer, resulting in cavitations of electrolyte and subsequent film failure. The second failure step involves corrosion of Nd element in the Nd-Fe-B layer, with Fe element remaining beneath the corrosion product. Corrosion of Fe constitutes the third-step failure, forming a mixture of Nd and Fe corrosion product. (C) 2011 Elsevier Ltd. All rights reserved.