采用两种不同的酸碱复合催化方法制备SiO2增透膜,对该增透膜的透过率、表面形貌、硬度等进行了比较.第一种方法是滴加HCl制备薄膜,与酸催化法制备的薄膜相比,透光率有所提高,但薄膜表面不均匀,影响了薄膜的透光率;第二种方法是滴加酸溶胶制备薄膜,其透过率高,薄膜硬度大,且薄膜表面颗粒均匀平整.采用红外光谱,XRD和SEM等手段对两种方法制备薄膜的结构和表面形貌进行了表征,结果表明,滴加酸溶胶法得到的薄膜性质更稳定,透光率、强度等指标也最优.
Two different methods of acid-base composite catalyzed were introduced, the transmittance, surface morphology and hardness of the antireflection coating were compared.The first method is adding HCl to prepare the film, compared with the film prepared by acid catalysis, the transmittance is improved, but the film surface is not uniform, which affects the light transmittance.The second method is the drop of acid sol preparation film, its high transmittance, large film hardness, and the surface of the film is even.The structure and surface morphology of the prepared films were characterized by IR, XRD and SEM.The results show that the films obtained by dropping acid sol are more stable and have the best transmittance and strength.
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