SrTiO3 thin film was successfully prepared on the functionalized organic self-assembled monolayers (SAMs) by the Liquid Phase Deposition (LPD) method . The as-prepared samples were characterized by X-ray diffraction (XRD), atomic force microscope (AFM), scanning electron microscopy (SEM) and metallographic microscope . Measurement of contact angle showed that the hydrophobe substrate was changed into hydrophile by UV irradiation . AFM photographs of octadecyl-trichloro-silane self-assembled monolayer (OTS-SAM) surface approved that UV irradia-tion did change the morphology of OTS monolayer and provided evidence for the conversion of hy-drophilic characteristic . Photographs of Metallographic Microscope showed that OTS-SAM had an active effect on the deposition of SrTiO3 thin film . XRD and SEM indicated that the thin film was of pure cubic phase SrTiO3 and composed of nanosized grains with a size in the range of 100-500 nm . The formation mechanism of the SrTiO3 film was proposed .
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