以甲烷和三氯化硼的混合气为反应气体,采用化学气相沉积法制备硼掺杂玻璃炭材料.利用X射线衍射仪、拉曼光谱仪、扫描和透射电子显微电镜对沉积产物的微观结构进行表征.结果表明,沉积产物是一种玻璃炭材料,但在其基体中均匀分布着约20 nm的碳化硼颗粒.由于硼元素强烈的催化石墨化作用,硼掺杂玻璃炭表现出完全不同于传统玻璃炭材料的石墨化行为.硼掺杂玻璃炭经高温热处理后,其结构发生剧烈变化而转变为片层炭结构,其转变过程可能遵循“固溶-析出”机制.
A boron-doped glassy carbon was fabricated by chemical vapor deposition from a gaseous CH4/BCl3 mixture.It was characterized by X-ray diffraction,Raman spectroscopy,scanning,and transmission electron microscopy.Results show that the deposited carbon is characteristic of a glass-like carbon but with boron carbide nanocrystals around 20 nm in diameter uniformly distributed in its matrix.In contrast to the conventional non-graphitizable glassy carbon,the product behaved similarly to a graphtitizable carbon on high-temperature treatment because of the strong catalytic graphitization effect of the boron.The glass carbon was transformed into lamellar carbon structures,probably by a dissolutionprecipitation mechanism.
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