This paper reports a low noise switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer. The time division multiplexing of the same electrode is adopted to avoid the strong feedthrough between capacitance sensing and electrostatic force feedback. A PID controller is designed to ensure the stability and dynamic response of a high Q closed-loop accelerometer with a vacuum package. The architecture only requires single ended operational amplifiers, transmission gates and capacitors. Test results show that a full scale acceleration of±3 g, non-linearity of 0.05% and signal bandwidth of 1000 Hz are achieved. The complete in closed-loop. The chip is fabricated in the 2μm two-metal and two-poly n-well CMOS process with an area of 15.2 mm<'2>. These results prove that this circuit is suitable for high performance micro-accelerometer applications like seismic detection and oil exploration.
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