参考文献
| [1] | Zhang J.MEMS-based micro-silicon piezoresistive accelerometer design[J].Electron Sci & Tech,200922(10):40. |
| [2] | Yazdi N;Ayazi F;Najafi K.Micromachined inertial sensors[A].,1998:1640. |
| [3] | Chen S;Xue C;Zhang W.Fabrication and testing of a silicon-based piezoresistive two-axis accelerometer[J].Nanotechnology and Precision Engineering,20086(04):272. |
| [4] | Wang Zhuo;Xu Yong.Design and optimization of an ultrasensitive piezoresistive accelerometer for continuous respiratory sound monitoring[J].Sensor Lett,20075(02):450. |
| [5] | Wang Q M;Yang Z C;Li F.Analysis of thin film piezoelectric microaccelerometer using analytical and finite element modeling[J].Sensors and Actuators A-physical,2004113(01):1. |
| [6] | Lee I;Yoon G H;Park J.Development and analysis of the vertical capacitive accelerometer[J].Sensors and Actuators A-physical,2005119(01):8. |
| [7] | Barth P W;Poruahmadi F;Mayer R.A monolithic silicon accelerometer with integral air damping and overrange protection[M].IEEE Solid-State Sensor and Actuator Workshop,Technical Digest,Hilton Head Island,SC,USA,1988:35. |
| [8] | Sandmaier H;Kuhl K;Obermeier E.A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation[A].,1987 |
| [9] | Chen H;Shen S Q;Bao M H.Over-range capacity ofa piezoresistive microaccelerometer[J].Sensors and Actuators A-physical,199758(03):197. |
| [10] | Plaza J A;Dominguez C;Esteve J.BESOI-based integrated optical silicon accelerometer[J].Microelectromechan Syst,200413(02):355. |
| [11] | Amarasinghe R;Dao D V;Toriyama T.Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer[J].J Micromechan Microeng,200515(09):1745. |
| [12] | Sim J H;Kim D K;Bae Y H.Six-beam piezoresistive accelerometer with self-cancelling cross-axis sensitivity[J].Electronics Letters,199834(05):497. |
| [13] | Sahli S;Aslam D M.Ultra-high sensitivity intra-grain polydiamond piezoresistors[J].Sensors and Actuators A-physical,199871(03):193. |
| [14] | Lim M K;Du H;Su C.A micromachined piezoresistive accelerometer with high sensitivity design and modelling[J].Microelectronic Engineering,199949(3/4):263. |
| [15] | Smith C S.Piezoresistance effect in germanium and silicon[J].Physical Review,195494(01):42. |
| [16] | Amarasinghe R;Dao D V;Toriyam T.Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements[J].Sensors and Actuators A-physical,2007134(02):310. |
| [17] | Toriyama T;Tanimoto Y;Sugiyama S.Single crystal silicon nano-wire piezoresistors for mechanical sensors[J].Microelectromechan Syst,200211(05):605. |
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