采用硝酸铈为原料,聚乙烯吡咯烷酮为添加剂水热法合成CeO2前驱体,所得前驱体在不同温度下煅烧制备CeO2抛光粉,研究了煅烧温度对产品物性和抛光性能的影响.结果表明:水热合成的前驱体为直径～100 nm的类球形均匀颗粒;随煅烧温度的升高,产品结晶度提高,粒度逐渐增大,对K9玻璃的材料去除率先增大而后降低,在1050℃达到极大值.为此,确定了合成中位粒径在200 ～400 nm之间的CeO2高效抛光粉的最佳条件.
参考文献
| [1] | 李永绣;周新木;辜子英;彭德院;胡平贵;周雪珍;焦晓燕;何小彬;魏坤;刘桂华.稀土抛光材料的生产、应用及其新进展[J].稀土,2002(5):71-74. |
| [2] | 王艳杰;刘瑞;吕广明;孙聆东;黄云辉;严纯华.纳米CeO2的催化基础及应用研究进展[J].中国稀土学报,2014(3):257-269. |
| [3] | Y. G. Wang;L. C. Zhang;A. Biddut.Chemical effect on the material removal rate in the CMP of silicon wafers[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,20113/4(3/4):312-316. |
| [4] | Liangyong Wang;Kailiang Zhang;Zhitang Song;Songlin Feng.Ceria concentration effect on chemical mechanical polishing of optical glass[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,200711(11):4951-4954. |
| [5] | D. Ng;M. Kulkarni;J. Johnson;A. Zinovev;D. Yang;H. Liang.Oxidation and removal mechanisms during chemical-mechanical planarization[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,20077/12(7/12):1477-1483. |
| [6] | 胡莉茵.沉淀法制备CeO2超微粉末[J].中国稀土学报,1996(4):372-375. |
| [7] | 李霞章;陈杨;陈志刚;陈建清.基于不同醇的醇水法制备纳米CeO2的研究[J].电子元件与材料,2006(3):43-45. |
| [8] | 刘志强;梁振锋;李杏英.碳铵沉淀法制备纳米氧化铈的研究[J].稀土,2006(5):11-14. |
| [9] | 徐华蕊.用喷雾反应法制备实心球形氧化铈超细粉末[J].稀土,1999(06):29. |
| [10] | Kaneko K;Inoke K;Freitag B;Hungria AB;Midgley PA;Hansen TW;Zhang J;Ohara S;Adschiri T.Structural and morphological characterization of cerium oxide nanocrystals prepared by hydrothermal synthesis[J].Nano letters,20072(2):421-425. |
| [11] | 王成云;苏庆德;钱逸泰.非水溶剂水热法制备CeO2纳米粉[J].化学研究与应用,2001(4):402-405. |
| [12] | 周雪珍;程昌明;胡建东;辜子英;胡平贵;李永绣.以碳酸铈为前驱体制备超细氧化铈及其抛光性能[J].稀土,2006(1):1-3,29. |
| [13] | Yong Xiu Li;Xue Zhen Zhou;Yong Wang.Preparation of nano-sized CeO_2 by mechanochemical reaction of cerium carbonate with sodium hydroxide[J].Materials Letters,20041/2(1/2):245-249. |
| [14] | 陶豹;柳召刚;李梅;王觅堂;胡艳红;张盼.含镨稀土抛光粉的制备及其抛光性能研究[J].中国稀土学报,2014(2):221-227. |
| [15] | Fu Zhou;Xuemei Zhao;Hai Xu;Cunguang Yuan.CeO2 Spherical Crystallites: Synthesis, Formation Mechanism, Size Control, and Electrochemical Property Study[J].The journal of physical chemistry, C. Nanomaterials and interfaces,20074(4):1651-1657. |
| [16] | Zhou F;Ni XM;Zhang YF;Zheng HG.Size-controlled synthesis and electrochemical characterization of spherical CeO2 crystallites[J].Journal of Colloid and Interface Science,20071(1):135-138. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%