使用中国原子能科学研究院HI-13串列加速器产生的32 S离子轰击BOPET薄膜，薄膜在空气中陈化3个月后在专用装置中使用NaOH溶液蚀刻制备核孔膜，研究NaOH溶液浓度、蚀刻温度对微孔孔形的影响。在不同温度和蚀刻液浓度条件下，蚀刻出微孔孔径为0.2至0.93μm的亚微米核孔膜，计算其微孔锥角，得出微孔锥角随着蚀刻温度、蚀刻液浓度和微孔孔径的变化趋势。研究表明，采用低浓度、高温度的NaOH溶液蚀刻有利于减小微孔锥角，有利于制备较小孔径的核孔膜。如选用0.5 mol/L的NaOH溶液浓度，在蚀刻温度为90℃的条件下蚀刻，此时蚀刻时间小于2 h，既可以得到高质量微孔膜也有利于提高生产效率。
The PET membranes are irradiated by 32S ions. The 32S ions were produced by the HI-13 tandem accelerator in China Institute of Atomic Energy. The membranes used for the experiment have been aged in air for three months. The PET membranes are etched in the particular device. Sodium hydroxide solution is used as etchant. The effects of different concentration of sodium hydroxide solution and etching temperature on the pore shape have been studied. The pores have a diameter of 0.2～0.93 μm respectively in different membranes and the taper angle have been calculated. The pore diameter, etchant concentration and etching temperature respectively as a function of the taper angle under different etching conditions are displayed. The experiment result showed that low concentrations of sodium hydroxide solution with high temperature make the pore taper angle and pore size relatively smaller and the pore more close to a cylinder which enables us to conclude the proper etching condition for producing. Meanwhile, Pore taper angle was relatively minimal on 0.5 mol/L sodium hydroxide solution, at 90℃with etching time in 2 hours.
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