室温下利用磁控溅射制备了ZnO/Cu/ZnO透明导电薄膜,采用X射线衍射(XRD)、原子力显微镜(AFM)、扫描电子显微镜(SEM)、霍尔效应测量仪和紫外-可见分光光度计研究了薄膜的结构、形貌、电学及光学等性能与退火温度之间的关系.结果表明:退火前后薄膜均具有ZnO(002)择优取向,随着退火温度的升高,薄膜的晶化程度、晶粒粒径及粗糙度增加,薄膜电阻率先降低后升高,光学透过率和禁带宽度先升高后降低.150℃下真空退火的ZnO/Cu/ZnO薄膜的性能最佳,最高可见光透光率为90.5％,电阻率为1.28×10-4Ω·cm,载流子浓度为4.10×1021 cm-3.
参考文献
| [1] | Yuan-Chang Liang .Growth and characterization of nonpolar a-plane ZnO films on perovskite oxides with thin homointerlayer[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2010(1):158-161. |
| [2] | Y.J. Chen;Y.Y. Shih;C.H. Ho .Effect of temperature on lateral growth of ZnO grains grown by MOCVD[J].CERAMICS INTERNATIONAL,2010(1):69-73. |
| [3] | 刘心宇,江民红,周秀娟,成钧,王仲民.Al掺杂ZnO薄膜的射频磁控溅射工艺与光电性能研究[J].材料工程,2008(10):215-218. |
| [4] | ZHANG F L;GADISA A;INGANAS O et al.Influence of buffer layers on the performance of polymer solar cells[J].Applied Physics Letters,2004,84(19):3906-3908. |
| [5] | ADACHI C;NAGAI K;TAMOTO N .Molecular design of hole transport materials for obtaining high durability in organic electroluminescent diodes[J].Applied Physics Letters,1995,66(20):2679-2681. |
| [6] | Tadatsugu Minami .Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(17):5822-5828. |
| [7] | The effect of annealing on Al-doped ZnO films deposited by RF magnetron sputtering method for transparent electrodes[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2010(11):p.2941. |
| [8] | SONG C;CHEN H;FAN Y .High-work-function transparent conductive oxides with muhilayer films[J].Appl Phys Express,2012,5(4):041101-041103. |
| [9] | Sahu DR;Huang JL .The properties of ZnO/Cu/ZnO multilayer films before and after annealing in the different atmosphere[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(2/4):208-211. |
| [10] | Seungjun Lee;Seokhwan Bang;Joohyun Park;Soyeon Park;Youngbin Ko;Hyeongtag Jeon .AZO/Au/AZO multilayer as a transparent conductive electrode[J].Physica status solidi, A. Applications and materials science ePSS,2012(4):698-701. |
| [11] | Lee JH.;Park BO. .Transparent conducting ZnO : Al, In and Sn thin films deposited by the sol-gel method[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):94-99. |
| [12] | Jin-Hong Lee;Bong-Whan Yeo;Byung-Ok Park .Effects of the annealing treatment on electrical and optical properties of ZnO transparent conduction films by ultrasonic spraying pyrolysis[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2004(2):333-337. |
| [13] | Z.B. Fang;Z.J. Yan;Y.S. Tan;X.Q. Liu;Y.Y. Wang .Influence of post-annealing treatment on the structure properties of ZnO films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2005(3/4):303-308. |
| [14] | Tran, Nguyen H.;Lamb, Robert N.;Hartmann, Andreas J. .Structural order of nanocrystalline ZnO films[J].The journal of physical chemistry. B, Materials, Surfaces, Interfaces & Biophysical,1999(21):4264-4268. |
| [15] | Hyun-Jin Cho;Kyung-Woo Park;Jun-Ku Ahn .Nanoscale Silver-Based Al-Doped ZnO Multilayer Transparent-Conductive Oxide Films[J].Journal of the Electrochemical Society,2009(8):215-220. |
| [16] | Kermani, H.;Fallah, H.R.;Hajimahmoodzadeh, M..Design and fabrication of nanometric ZnS/Ag/MoO_3 transparent conductive electrode and investigating the effect of annealing process on its characteristics[J].Physica, E. Low-dimensional systems & nanostructures,2013:303-308. |
| [17] | Lee, H.M.;Lee, Y.J.;Kim, I.S.;Kang, M.S.;Heo, S.B.;Kim, Y.S.;Kim, D. .Annealing effect of ZnO/Au/ZnO transparent conductive films[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2012(10):1494-1498. |
| [18] | Mohamed SH .Effects of Ag layer and ZnO top layer thicknesses on the physical properties of ZnO/Ag/Zno multilayer system[J].The journal of physics and chemistry of solids,2008(10):2378-2384. |
| [19] | G. H. Lee;Y. Yamamoto;M. Kourogi;M. Ohtsu .Blue shift in room temperature photoluminescence from photo-chemical vapor deposited ZnO films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1):117-120. |
| [20] | 马瑞新,李士娜,锁国权,任磊.偏压对ITO薄膜生长模式和光电性能的影响[J].材料科学与工艺,2012(04):65-69. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%