采用大功率离子束辅助(IBAD)电子束物理气相沉积(EB-PVD)制备Nb/Nb5Si3叠层状复合材料.利用X-射线衍射(XRD)和扫描电镜(SEM)对材料的组成相和微观结构进行分析,探讨EB-PVD制备工艺对微叠层材料的结构和形貌的影响.采用双靶材、蒸气垂直入射及高温高束流制备微叠层材料,并进行真空热处理以考察微叠层材料在1200℃下保温3h后的结构演变.实验结果表明:制备出Nb/Nb5Si3微叠层复合材料,由立方Nb和四方Nb5 Si3混合相组成,具有明显的层状结构.真空热处理后,微叠层材料柱状晶结构向等轴晶转化.
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