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  4. 大面积石墨烯薄膜转移技术研究进展

航空材料学报, 2015, 35(2): 1-11. doi: 10.11868/j.issn.1005-5053.2015.2.001

大面积石墨烯薄膜转移技术研究进展

陈牧 1, , 颜悦 2, , 张晓锋 3, , 刘伟明 4, , 周辰 5, , 郭志强 6, , 望咏林 7, , 厉蕾 8, , 张官理 9,

1.北京航空材料研究院,北京,100095

2.北京航空材料研究院,北京,100095

3.北京航空材料研究院,北京,100095

4.北京航空材料研究院,北京,100095

5.北京航空材料研究院,北京,100095

6.北京航空材料研究院,北京,100095

7.北京航空材料研究院,北京,100095

8.北京航空材料研究院,北京,100095

9.北京航空材料研究院,北京,100095

关键词： 石墨烯薄膜 , 转移技术 , 目标基片 , 中介物过渡转移 , 卷对卷转移

Advances in Large-Area Graphene Film Transfer Techniques

Keywords： graphene films , transfer techniques , target substrates , mediator-assisted transfer , roll-to-roll transfer

化学气相沉积法合成的石墨烯薄膜在实现石墨烯产业化应用过程中,依赖于大面积薄膜转移技术的突破性进展.本文按照中介物过渡转移法、直接干法和湿法转移法、大规模卷对卷转移法分类介绍了现有的30多种石墨烯薄膜转移方法,从微观机理到宏观实现方法对比了三类方法的优缺点和适用范围:中介物过渡转移法主要用于实验室阶段科学探索,转移后的薄膜质量高但尺寸小;直接干法和湿法转移法减少了中介物过渡流程,但仍处于小试阶段;大规模卷对卷转移法借鉴了半导体薄膜工业成熟的卷对卷技术,实现了米级尺寸薄膜的高效和可重复性转移,是目前批量化转移石墨烯薄膜的最有效途径.

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