采用反应溅射和后续退火工艺,在石英衬底上制备具有热致相变特性的VO2薄膜,并对薄膜的光学性能进行表征.研究发现:在弱光辐射下,随着温度的改变,薄膜的透射率在可见及近红外光区会发生显著变化,具有良好的相变光开关特性;在强光辐射下,制备的VO2薄膜同样具有良好的红外光调制深度;当脉冲激光波长为1064 nm时,随着脉冲能量的逐渐增强,薄膜的表面反射率逐渐降低,光限幅性能呈现出先升高再降低的趋势,其透射率最低可降至7%,薄膜的脉冲激光损伤阈值约为50 mJ/cm2.
Thermochromic VO2 film was fabricated on quartz substrate through sputtering oxidation coupling method,and its optical properties were also investigated.Results show that the prepared VO2 film exhibits good thermo-optical switching performance under weak light irradiation,while large transmittance changes both in the visible and near-infrared light area.Under the condition of pulsed power laser irratiating,large optical modulation depth is also derived in the infra-red region.With the increase of pulsed laser energy,the scattering coefficient is gradually decreased,and the anti-laser irradiation ability is firstly appeared to have a decline trend after an initial ascent.The minimum transmittance value can reach to 7% and the laser damage threshold is about 50 mJ/cm2.
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