利用全自动化功能磁控溅射技术在硅/PS(聚苯乙烯)胶体球模板上制备了具有室温铁磁性和紫外发光特性的两种ZnO微米级圆晶.采用SEM、XRD、PL和VSM对样品进行了表征.结果表明:在PS胶体球去除方法上采用略有不同工艺制备的六边形和反置六边形结构ZnO微米级圆晶均具有(002)择优取向,晶粒大小分别为21.7nmn和26.5 nm,应力分别为3.26×109 Pa和-1.21×109 Pa,均出现361nm和444nm两个发光峰.两种结构ZnO阵列的铁磁性有所不同,可能是缺陷不同引起的.
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