欢迎登录材料期刊网

材料期刊网

高级检索

纳米多层膜是在单层膜与复合膜的基础上发展起来的一种新型薄膜,它被广泛应用于机械加工、航空航天、能源等领域,作为结构材料或功能材料都具有良好的发展前景.介绍了近十几年纳米多层膜的研究状况,主要从多层膜体系、制备技术、多层膜的性能以及多层膜的表征方法4个方面对纳米多层膜进行了综述,同时对纳米多层膜的超硬机制、纳米多层膜未来的研究方向和应用前景进行了分析.

参考文献

[1] 陈德军 .TiN/AlN纳米多层膜的制备与性能研究[D].广东工业大学,2007.
[2] 李宁,宋绪丁.超硬多层薄膜的研究现状及展望[J].材料保护,2005(07):31-35.
[3] Wen M;Huang H;Zhang K et al.Effects of modulation periodicity on microstructure,mechanical and tribological properties of NbN/AlN nanostructured multilayer films[J].Applied Surface Sinence,2013,284:331.
[4] Li Chen;Yong Du;Xiang Xiong;Ke K. Chang;Ming J. Wu .Improved properties of Ti-Al-N coating by multilayer structure[J].International Journal of Refractory Metals & Hard Materials,2011(6):681-685.
[5] 李玉阁,李冠群,李戈扬.调制结构对c-VC/h-TiB2纳米多层膜的超硬效应的影响[J].物理学报,2013(01):356-360.
[6] Lao JJ;Shao N;Mei FH;Li GY;Gu MY .Mutual promotion effect of crystal growth in TiN/SiC nanomultilayers[J].Applied physics letters,2005(1):1902-1-1902-3-0.
[7] 张金林 .磁控溅射金属增韧的TiN/AlN纳米多层膜制备与性能研究[D].沈阳:沈阳大学,2012.
[8] S. Labat;F. Bocquet;B. Gilles .Stresses and interfacial structure in Au-Ni and Ag-Cu metallic multilayers[J].Scripta materialia,2004(6):717-721.
[9] LV Peng,ZHANG ZaiQiang,GUAN JinTong,WANG XiaoDong,HOU XiuLi,ZHANG LingYan,WANG JiJun.Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering[J].中国科学:物理学 力学 天文学(英文版),2013(09):1689-1693.
[10] 程东,严志军,严立,高玉周.Cu/Ni多层膜的调制波长与力学性能的关系[J].大连海事大学学报,2007(03):122-124.
[11] Chu X;Wong M S;Sproul W D et al.Mechanical properties and microstructures of polycrystalline ceramic/metal superlattices:TiN/Ni and TiN/Ni0.9Cr0.1[J].Surface and Coatings Technology,1993,61(1-3):251.
[12] Madan A.;Barnett SA.;Engstrom C.;Ljungcrantz H.;Hultman L. Grimsditch M.;Wang YY. .Enhanced mechanical hardness in epitaxial nonisostructural Mo/NbN and W/NbN superlattices[J].Journal of Applied Physics,1998(2):776-785.
[13] Lee J H;Kim W M;Lee T S et al.Mechanical and adhesion properties of Al/AlN multilayered thin films[J].Surface and Coatings Technology,2000,133-134:220.
[14] Wang X;Kolitsch A;Moller W .Roughness improvement and hardness enhancement in nanoscale Al/AlN multilayered thin films[J].Applied physics letters,1997(14):1951-1953.
[15] Helmersson U;Todorova S;Barnett S A et al.Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness[J].Journal of Applied Physics,1987,62(02):481.
[16] J. C. Caicedo A;G. Bejarano G;M. E. Gomez;P. Prieto;C. Cortéz;J. Munoz .Nanostructured multilayers of TiN/ZrN obtained by magnetron sputtering[J].Physica Status Solidi. C, Conferences and critical reviews,2007(11):4127-4133.
[17] Barshila H C;Jain A;Rajam K S et al.Structure,hardness and thermal stability of nanolayered TiN/CrN multilayer coatings[J].VACUUM,2003,72(03):241.
[18] Del Re, M;Dauchot, JP;Hecq, M .Study of the moisture and thermal resistance of AlN/ZrN/AlN multilayers coating[J].Surface & Coatings Technology,2005(1/4):94-99.
[19] 陈德军,代明江,林松盛,李洪武,候惠君.TiN/AlN纳米多层膜的调制周期及力学性能研究[J].真空,2007(04):52-54.
[20] Shengfa Zhu;Yanping Wu;Tianwei Liu .interface Structure and Corrosion Resistance of Ti/Cr Nanomultilayer Film Prepared by Magnetron Sputtering on Depleted Uranium[J].ACS applied materials & interfaces,2013(14):6598-6602.
[21] Olbrich W;Fessmann J;Kampschulte G et al.Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias[J].Surface and Coatings Technology,1991,49(1-3):258.
[22] 赵彦辉;林国强;李晓娜 等.脉冲偏压对电弧离子镀Ti/TiN纳米多层膜显微硬度的影响[J].金属学报,2005,41(10):100.
[23] 兰昊,陈广超,戴风伟,李彬,唐伟忠,李成明,宋建华,J.Askari,黑立富,佟玉梅.微/纳米多层金刚石自支撑膜的制备及生长特性的研究[J].人工晶体学报,2007(01):166-169.
[24] 杨西,杨玉华.化学气相沉积技术的研究与应用进展[J].甘肃水利水电技术,2008(03):211-213.
[25] 陶斯武,雷诺,曲选辉.纳米硬质薄膜的研究发展[J].稀有金属与硬质合金,2005(03):37-41,55.
[26] 劳技军,孔明,张惠娟,李戈扬.TiN/SiC纳米多层膜的生长结构与力学性能[J].物理学报,2004(06):1961-1966.
[27] Veprek S;Niederhofer A;Moto K et al.Composition,nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a-and nc-TiSi2 nanocomposites with Hv =80 to ≥ 105GPa[J].Surface and Coatings Technology,2000,133-134:152.
[28] Anderson P M;Li C .Hall-Petch relations for multilayered materials[J].Nanostructured Materials,1995,5(03):349.
[29] Koehler J S .Attempt to design a strong solid[J].Physical Review B:Condensed Matter,1970,2(02):547.
[30] 杜会静,田永君.超硬纳米多层膜致硬机理研究[J].无机材料学报,2006(04):769-775.
[31] 彭志坚,齐龙浩,刘大鹏,李文治,苗赫濯.低温PVD法制备多组分超硬薄膜研究[J].材料科学与工程学报,2003(01):110-116.
[32] Yue J L;Shi W;Li G Y .Modulation structure and superhardness effect of VC/TiN nano-multilayer films[J].Appl Mechan Mater,2012,184-185:1080.
[33] 张学华,曹猛,王明霞,刘桐,李德军.调制周期对TaN/NbN纳米多层膜力学性能的影响[J].金属功能材料,2007(01):23-26.
[34] Wen M;Hao H;Zhang K et al.The AlN layer thickness dependent coherent epitaxial growth,stress and hardness in NbN/AlN nanostructured multilayer films[J].Surface and Coatings Technology,2013,235:367.
[35] 孔明,岳建岭,李戈扬.陶瓷硬质纳米多层膜研究进展[J].无机材料学报,2010(02):113-119.
[36] M. Karlsohn;S. Weber;S. R. Alavi Zaree .Manufacturing, microstructure and wear resistance of novel hot extruded Fe based metal matrix composites[J].Powder Metallurgy,2008(1):31-37.
[37] 蔡志海,底月兰,张平.活塞环表面Cr/CrN纳米多层膜的微观结构与摩擦学性能[J].沈阳工业大学学报,2011(04):375-381.
[38] 龚海飞,邵天敏.TiN/Ti多层膜韧性对摩擦学性能的影响[J].材料工程,2009(10):26-31.
[39] 姚舜晖,苏演良,高文显,刘醇鸿.磁控溅射氮化钛/氮化铝纳米多层膜的抗磨性能及其在金属加工刀具中的应用研究[J].摩擦学学报,2005(03):258-264.
[40] Pandey R;Sutjianto A;Seel M et al.Electronic structure of high pressure phase of AlN[J].Journal of Materials Research,1993,8(08):1922.
[41] PalDey S;Deevi S C .Cathodic arc deposited FeAl coatings:Properties and oxidation characteristics[J].MATERIALS SCIENCE & ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING,2003,355(1-2):208.
[42] 王永康,雷廷权,夏立芳,熊仁章.Ti0.5Al0.5N涂层的抗高温氧化行为[J].材料工程,2001(01):12-14.
[43] 刘爱华,邓建新,颜培,刘文清.TiAlN涂层刀具的抗高温特性研究[J].制造技术与机床,2010(07):94-96.
[44] 张雨萌,朱丽慧,倪旺阳,刘一雄.Al含量对TiAlN涂层热稳定性能的影响[J].中南大学学报(自然科学版),2013(07):2696-2701.
[45] Li W;Liu P;Zhao Y S et al.Structure,mechanical properties and thermal stability of CrAlN/ZrO2 nanomultilayers deposited by magnetron sputtering[J].Journal of Alloys and Compounds,2013,562:5.
[46] 李俊,闫金良,杨春秀,李科伟,于芬.ZnO/Ag/ZnO多层膜的制备和性质研究[J].电子元件与材料,2007(03):52-54.
[47] M. Neghabi;A. Behjat;S.M.B. Ghorashi;S.MA Salehi .The effect of annealing on structural, electrical and optical properties of nanostructured ZnS/Ag/ZnS films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2011(16):5662-5666.
[48] Balakrishnan G;Sairam T N;Reddy V R et al.Microstructure and optical properties of Al2O3/ZrO2 nano-multilayer thin films prepared by pulsed laser deposition[J].Materials Chemistry and Physics,2013,140(01):60.
[49] 王军,殷俊林,严彪.铁基多层纳米磁性薄膜的组织与磁性能研究[J].上海金属,2011(04):19-22.
[50] 胡冰,李晓娜,董闯,姜辛.磁控溅射法合成纳米β-FeSi2/a-Si多层结构[J].物理学报,2007(12):7188-7194.
[51] 朱雪婷,孙勇,郭中正,段永华,吴大平.射频磁控溅射沉积Al/Al2O3纳米多层膜的结构及性能[J].真空科学与技术学报,2013(05):477-482.
[52] 潘应君,邓敏,陈淑花,向往,李晓光,吴新杰.多弧离子镀制备TiN/AlN纳米多层膜及其超硬效应[J].武汉科技大学学报(自然科学版),2008(03):312-315.
[53] 肖晓玲.纳米多层膜的研究进展[J].材料研究与应用,2007(01):1-10.
[54] Ming Kong;Wenji Zhao;Ying Wu .Microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO2 nanomultilayer coatings[J].Journal of coatings technology and research,2012(2):177-182.
[55] Pei-Ling Sun;Cherng-Yuh Su;Tai-Pin Liou .Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2011(6):3197-3201.
[56] Lin, J;Moore, JJ;Mishra, B;Pinkas, M;Sproul, WD .Nano-structured CrN/AlN multilayer coatings synthesized by pulsed closed field unbalanced magnetron sputtering[J].Surface & Coatings Technology,2009(6/7):936-940.
[57] Li W;Liu P;Wang J T et al.Microstructure and mechanical properties of TiAlN/SiO2 nanomuhilayers synthesized by reactive magnetron sputtering[J].Materials Letters,2011,65(04):636.
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
文章评分
  • 您的评分:
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%