概述了采用不同磁控溅射技术制备CrAlN涂层的国内外研究现状与发展趋势,重点分析了CrAlN涂层的结构、力学性能、涂层氧化行为与耐腐蚀性能.提出了不同磁控溅射制备工艺的进一步优化结合和新型磁控溅射制备工艺的研究是未来磁控溅射技术制备CrAlN涂层的新趋势,在进一步提高CrAlN涂层性能的基础上,需深入探究该类硬度涂层的工业新应用潜力.
参考文献
| [1] | Li, W. Z.;Chen, Q. Z.;Polcar, T.;Serra, R.;Cavaleiro, A..Influence of Zr alloying on the mechanical properties, thermal stability and oxidation resistance of Cr-Al-N coatings[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2014Oct.30(Oct.30):269-277. |
| [2] | 汝强;胡社军;黄拿灿;赵灵智;邱秀丽;胡显奇.钛合金表面电弧离子镀TiAlN涂层的抗高温氧化性能研究[J].材料保护,2007(1):28-31. |
| [3] | 张诤;尹小定;王社斌;余春燕.直流磁控溅射Cr（Al）N薄膜的结构与性能比较研究[J].材料导报,2008(z3):359-362. |
| [4] | Yu-Sen Yang;Ting-Pin Cho;Jia-Hau Lin.Optimizing hydrophobic and wear-resistant properties of Cr-Al-N coatings[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2013Oct.1(Oct.1):612-616. |
| [5] | Derflinger VH;Schutze A;Ante M.Mechanical and structural properties of various alloyed TiAlN-based hard coatings[J].Surface & Coatings Technology,200616/17(16/17):4693-4700. |
| [6] | Makino Y.;Nogi K..Synthesis of pseudobinary Cr-Al-N films with B1 structure by rf-assisted magnetron sputtering method[J].Surface & Coatings Technology,19981/3(1/3):1008-1012. |
| [7] | Barshilia HC;Selvakumar N;Deepthi B;Rajam KS.A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings[J].Surface & Coatings Technology,20066(6):2193-2201. |
| [8] | R. Wuhrer;W. Y. Yeung.A comparative study of magnetron co-sputtered nanocrystalline titanium aluminium and chromium aluminium nitride coatings[J].Scripta materialia,200412(12):1461-1466. |
| [9] | Weirather, T.;Czettl, C.;Polcik, P.;Kathrein, M.;Mitterer, C..Industrial-scale sputter deposition of Cr_(1-x)Al_xN coatings with 0.21 ≤ x ≤ 0.74 from segmented targets[J].Surface & Coatings Technology,2013:303-310. |
| [10] | 郑康培;刘平;李伟;马凤仓;杨丽红;刘新宽;陈小红.工艺参数对直流溅射沉积CrAlN涂层结构和性能的影响[J].真空科学与技术学报,2011(5):545-549. |
| [11] | 郑康培;刘平;李伟;马凤仓;刘新宽;陈小红;杨丽红.Al含量对CrAlN涂层微观结构和力学性能的影响[J].真空科学与技术学报,2011(6):686-690. |
| [12] | Brizuela, M;Garcia-Luis, A;Braceras, I;Onate, JI;Sanchez-Lopez, JC;Martinez-Martinez, D;Lopez-Cartes, C;Fernandez, A.Magnetron sputtering of Cr(AI)N coatings: Mechanical and tribological study[J].Surface & Coatings Technology,20051/4(1/4):192-197. |
| [13] | Yanhong Lv;Li Ji;Xiaohong Liu;Hongxuan Li;Huidi Zhou;Jianmin Chen.Influence of substrate bias voltage on structure and properties of the CrAIN films deposited by unbalanced magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,20128(8):3864-3870. |
| [14] | N. Bagcivan;K. Bobzin;S. Theiss.(Cr_(1-x)Al-x)N: A comparison of direct current, middle frequency pulsed and high power pulsed magnetron sputtering for injection molding components[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2013Jan.15(Jan.15):180-186. |
| [15] | Jianliang Lin;Malki Pinkas;William D. Sproul;John J. Moore.The phase and microstructure of CrAIN films deposited by pulsed de magnetron sputtering with synchronous and asynchronous bipolar puises[J].Thin Solid Films,20111(1):166-173. |
| [16] | 吕艳红;孔庆花;吉利;李红轩;刘晓红;陈建敏;周惠娣.氦气流量对中频非平衡反应磁控溅射制备CrAlN薄膜性能的影响[J].中国表面工程,2011(4):7-12. |
| [17] | Zhao Li;Paul Munroe;Zhong-tao Jiang.Designing superhard, self-toughening CrAlN coatings through grain boundary engineering[J].Acta materialia,201216(16):5735-5744. |
| [18] | Yu-ping Feng;Li Zhang;Rong-xian Ke.Thermal stability and oxidation behavior of AlTiN, AlCrN and AlCrSiWN coatings[J].International Journal of Refractory Metals & Hard Materials,2014Mar.(Mar.):241-249. |
| [19] | Kawate M.;Hashimoto AK.;Suzuki T..Oxidation resistance of Cr1-xAlxN and Ti1-xAlxN films[J].Surface & Coatings Technology,20032(2):163-167. |
| [20] | Reiter AE;Derflinger VH;Hanselmann B;Bachmann T;Sartory B.Investigation of the properties of Al1-xCrxN coatings prepared by cathodic arc evaporation[J].Surface & Coatings Technology,20057(7):2114-2122. |
| [21] | 卢国英 .脉冲偏压电弧离子镀CrAlN薄膜性能研究[D].大连理工大学,2006. |
| [22] | 余春燕 .闭合场非平衡磁控溅射沉积的CrAlN薄膜组织结构和性能研究[D].太原理工大学,2009. |
| [23] | Mendibide, C;Steyer, P;Millet, JP.Formation of a serniconductive surface film on nanomultilayered TiN/CrN coatings and its correlation with corrosion protection of steel[J].Surface & Coatings Technology,20051/4(1/4):109-112. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%