利用溶胶一凝胶法制备出ZnO的凝胶前驱膜,用电子束退火取代传统炉子退火,对前驱膜进行后处理,退火时固定电子束加速电压为10 kV,退火时间为5 min,调节聚焦束流和电子束束流,使退火温度在600～900℃范围内变化.扫描电镜(SEM)、X射线衍射(XRD)、原子力显微镜(AFM)和压电力显微镜(PFM)的测试结果表明,运用电子束退火法可制备出晶粒尺寸小于30nm、沿(002)择优取向、具有压电效应的六方ZnO薄膜,且随着退火温度的升高,晶粒尺寸逐渐变大,薄膜的结晶性和取向变好,压电效应越来越明显.
The ZnO precursor film was prepared by sol-gel method and annealed by the electron beam which replaced the conventional furnace.The accelerating voltage was fixed at 10 kV and the annealing duration was fixed at 5 min.The annealing temperature was within the range of 600 *C to 900 ～C by adjusting the focus beam current and electron beam current.The results of scanning electron microscopy (SEM),X-ray diffraction (XRD),atomic force microscopy (AFM) and piezoelectric force microscopy (PFM) showed that the annealed ZnO thin film was a kind of microcrystalline film,grew along the preferred (002) peak and presented piezoelectric effect.With the increase of annealing temperature,the grain size increased gradually,the crystallinity and orientation of thin film were better,the piezoelectric effect was more and more obvious.
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