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利用阴极电弧离子镀技术在316L不锈钢基体上制备了CrN薄膜.采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪对CrN薄膜的形貌、成分和力学性能进行了表征.为了研究Si3N4和52100钢对磨副材料对CrN薄膜和316L不锈钢干摩擦行为的影响,在2N、5N、8N三种载荷下,将CrN薄膜和316L不锈钢基体与Si3 N4陶瓷球和52100钢球分别进行了往复式滑动干摩擦实验.采用扫描电子显微镜观察了磨痕的微观形貌,并对CrN薄膜和316L不锈钢基体的磨损机制进行了分析.结果表明:CrN薄膜表面平整,缺陷较少;CrN薄膜的纳米硬度约为28 GPa,弹性模量约为350 GPa;与Si3N4陶瓷球相比,CrN薄膜与52100钢球摩擦时摩擦因数相对较小(保持在0.7左右)且更加稳定;316L不锈钢的摩擦因数远大于CrN薄膜且波动较大;对磨球为Si3N4陶瓷球时,CrN薄膜的主要磨损机制为磨粒磨损,伴有少量的氧化和黏着磨损,316L不锈钢的磨损机制主要为磨粒磨损.和塑性变形,伴有少量的氧化和黏着磨损;对磨球为52100钢球时,CrN薄膜的主要磨损机制为黏着磨损,伴有少量的氧化,316L不锈钢的磨损机制主要为黏着磨损,伴有少量的氧化和磨粒磨损.CrN薄膜与两种对磨球的磨损量均小于316L不锈钢基体的磨损量,说明CrN薄膜有效提高了基体的耐磨性.

CrN thin films were deposited on 316L stainless steel substrate by cathodic arc ion plating technique.The topography,composition and mechanical properties of CrN thin films were characterized by scanning electron microscopy (SEM),X-ray diffraction (XRD) and nano indentation.In order to study the effects of the counter pair materials of Si3N4 and 52100 steel on the dry sliding friction behavior of CrN thin film and 316L stainless steel,the reciprocating sliding friction wear test on CrN thin film and 316L stainless steel against Si3N4 ceramic balls and 52100 balls were carried out under three kinds of loads (2 N,5 N and 8 N).The morphologies of wear scars were observed by using scanning electron microscope,and the sliding wear mechanisms of CrN film and 316L stainless steel were discussed.The results showed that the surface of CrN thin film was smooth,and the defect was less.The nano hardness and the elastic modulus of the CrN thin film were about 28 GPa and 350 GPa,respectively.Compared with the Si3N4 ceramic ball,the friction coefficient of the CrN film against the 52100 steel ball was relatively small (about 0.7) and more stable.The friction coefficient of 316L stainless steel was much larger than that of CrN film.The wear mechanisms of CrN films against Si3N4 ceramic ball was mainly abrasive wear,and against 52100 steel ball was delamination and abrasive wear of the composite.The wear mechanisms of 316L stainless steel were abrasive wear and plastic deformation of the composite.When sliding against Si3N4 ceramic ball,the wear mechanisms of CrN films was mainly abrasive particle wear,accompanied by a small amount of oxidation and adhesion,and the wear mechanisms of 316L stainless was mainly abrasive wear and plastic deformation,accompanied by a small amount of oxidation and adhesion.When sliding against 52100 steel ball,the wear mechanisms of CrN films was mainly adhesive wear,accompanied by a small amount of oxidation,and the wear mechanisms of 316L stainless was mainly adhesive wear,accompanied by a small amount of oxidation and grinding particle abrasion.The wear of CrN thin films with two kinds of wear resistance ball were less than 316L stainless steel matrix wear,indicating that CrN film effectively improve the wear resistance of the matrix.