作为一种新型二维材料,石墨烯在电学、光学、传热学及力学性能等方面均表现出极其优异的特性,对石墨烯的研究也得到众多研究者的关注.同时,拥有桥状悬浮结构的悬浮石墨烯(Suspended graphene)以其杂质少、受外界干扰小等优点使得石墨烯的本征特性得到最大化施展.在研究石墨烯的电子迁移率、传热性、力学性能等方面,悬浮石墨烯有着独特的优势,并且对提升微电子器件的性能作用显著.综述了悬浮石墨烯的制备与性质研究及其在微电子领域的应用进展,并展望了悬浮石墨烯的应用前景.
Graphene, as a new 2D material, possesses excellent properties in electrical, optical, thermal and mechanical features.Research on graphene has also attracted wide attentions of many researchers.Meanwhile, suspended graphene displays its intrinsic properties with fewer impurities and smaller influence from outside interference.Suspended graphene owns the unique advantages in studying graphene′s electronic mobility, heat resistance, mechanical properties and plays significant role in improving the performance of microelectronic devices.Research of suspended graphene and its application in the field of microelectronics are reviewed and the application prospect of suspended graphene is pointed out.
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