纳米多层膜因具有优异的力学性能与抗摩擦磨损性能使其在摩擦学领域具有重要的应用价值.采用磁控溅射沉积法制备了Al、AlN单层薄膜与Al/AlN纳米多层膜,探讨了纳米多层化对薄膜的力学性能和摩擦学性能的影响.采用纳米压痕仪和摩擦磨损试验机测量评价薄膜的纳米硬度和摩擦学性能.结果表明:Al/AlN纳米多层膜具有良好的周期调制结构,多层膜中的大量界面能显著提高薄膜的力学性能与摩擦学性能.多层膜的硬度为8.8 GPa,高于采用混合法则计算出的硬度值6.6 GPa;多层膜具有软质Al层和硬质AlN层的交替结构,在摩擦过程中,硬质AlN层可以起到良好的承载作用,软质层可以起到良好的减摩作用.相对于Al单层薄膜或AlN单层薄膜,Al/AlN纳米多层膜具有较低的摩擦因数(0.15)和优异的抗磨损性能.
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