Cr2AlC属于三元层状化合物MAX相,其兼具金属和陶瓷的综合性能,如金属的导热、导电、可加工性,陶瓷的抗氧化、耐腐蚀等性能.利用直流磁控溅射技术和后续退火工艺在高速钢基体上制备了Cr2AlC涂层,采用XRD、SEM等研究了气体流量及热处理工艺对涂层成分和物相组成的影响.结果表明:气体流量和退火温度对Cr2AlC相的形成至关重要,气体流量比过大和退火温度过高均不利于Cr2AlC的形成.不同气体流量下沉积态涂层主要由Cr-C化合物、非晶或者纳米晶等组成,均没有发现Cr2AlC相;涂层经750℃退火后不同气体流量比涂层均有一定量Cr2AlC相形成;且Cr2AlC相形成的温度范围随CH4/Ar气体流量比增加而变窄.含Cr2AlC MAX相涂层的硬度为10.6～17.6 GPa,弹性模量为255.3～323.4 GPa.
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