研究了利用磁控溅射方法制备的柔性硬质纳米复合涂层.结果表明柔性硬质纳米复合涂层具有以下优异性能:是一类具有高硬度、高韧性以及抗裂纹性能的新型涂层;具有较高的硬度模量比(H/E*≥0.1,E*=E/(1-v2))、弹性恢复系数(We≥60％)、压应力(σ＜0)L,且少缺陷的微观结构;生长处于Thornton结构区域相图的T区.磁控溅射非常适合制备纳米复合涂层,文中将对其制备柔性纳米复合薄膜的机理做深入阐述.涂层生长主要受以下3个参数影响:涂层生长过程中吸收的能量Ep,其包含沉积原子携带的能量Eca和轰击离子携带等能量Ebi(Ep=Eca+Ebi),基体温度Ts和涂层材料的熔点Tm.柔性硬质涂层具有广泛的应用前景,如柔性保护涂层、柔性功能涂层、防脆性涂层开裂的柔性保护涂层以及柔性多层涂层.文中还将详细阐述低温磁控溅射制备柔性纳米复合涂层的原理,并阐述纳米复合涂层及其性能的发展趋势.
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