为研究过渡层材料及结构对TiCN涂层性能的影响,设计3种Cr基及其化合物过渡层,利用多弧离子镀技术制备TiCN涂层.膜系分别为Cr/TiCN、Cr/CrN/TiCN和Cr/CrN/CrCN/TiCN.利用SEM、XRD、纳米压痕仪、划痕仪、摩擦磨损试验机和球磨仪对涂层的微观结构和性能进行表征.结果表明:随着过渡层由单层Cr依次加入CrN和CrCN,涂层原有的柱状晶生长被抑制并最终消除.与具有Ti过渡层的TiCN相比,涂层不再具有明显择优取向,(111)峰强度大大减弱而(200)峰发生宽化.具有CrN和CrCN过渡层的样品硬度和附着力明显高于以单层Cr为过渡层的样品,Cr/CrN/CrCN/TiCN膜系硬度和附着力最高,分别为(30.11±0.34) GPa和(37.21±0.46) N.摩擦磨损试验结果表明:CrCN过渡层的引入显著提升了涂层耐磨性,其对应样品摩擦因数最低,达到0.111,并在球磨测试中表现稳定,而其它膜系均出现不同程度的磨损形貌.
In order to study the effects of interlayers and their structure on the properties of TiCN coatings,TiCN coatings with interlayers of Cr,Cr/CrN and Cr/CrN/CrCN were deposited by multi-arc ion plating.Three coatings,Cr/TiCN,Cr/CrN/TiCN and Cr/CrN/CrCN/TiCN,were designed,respectively.Microstructure and properties of the coatings were systematically investigated by XRD,SEM,nano-indentation,scratch tester,attrition testing machine and ball mill tester.The results show that the structures of TiCN coatings with different interlayers of Cr,CrN and CrCN are various.Columnar crystal is restrained and then eliminated,and the preferred orientation of TiCN coatings is not obvious,strength of peak (111) decreases and peak (200) broadens comparing with that of using interlayer of Ti.Hardness and adhesion of TiCN coatings with interlayer of CrN and CrCN are higher than that with single interlayer of Cr.The Cr/CrN/CrCN/TiCN coating has the largest hardness and adhesion,(30.11±0.34) GPa and (37.21±0.46) N respectively.The attrition test indicates that coatings with interlayer of CrCN have the lowest friction coefficient,0.111,and it is stable during the ball mill test,while the coatings with other interlayer present varying degrees of wear.
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