随着晶体硅太阳电池技术的不断发展,硅片的厚度不断降低,电池表面钝化对提高太阳能电池转化效率变得尤为重要.本文介绍了表面钝化膜在晶体硅太阳电池中的应用,以及几种晶体硅电池表面钝化方法,包括等离子体增强化学气相沉积法、氢化非晶硅、热氧化法、原子层沉积法以及叠层钝化,并分别介绍了它们在应用上的优缺点.分析了制备钝化膜过程中存在的问题,并提出了相应措施及发展趋势.表面钝化技术是提高晶体硅电池转换效率最有效的手段之一,今后晶体硅电池表面钝化技术仍将是国内和国际研究的热点之一.
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