采用中频磁控溅射 Ti80Si20合金靶在单晶硅表面制备了钛硅共掺杂的类金刚石薄膜。利用紫外-可见光多波长Raman光谱表征薄膜微结构，并结合FTIR光谱研究了紫外光辐照对类金刚石薄膜微结构的影响，进一步讨论了紫外光辐照下薄膜微结构的演化机理。结果表明：非晶结构的类金刚石薄膜出现反式聚乙炔和聚对苯乙炔类聚合物结构以及sp杂化的线型卡宾碳结构。紫外光辐照诱导薄膜微结构驰豫和重构，薄膜Si-O和C-O键含量增加， C=C和C-H键含量减少；同时薄膜sp2团簇尺寸减小而无序度增大。
Titanium/silicon co-doped diamond-like carbon films were deposited on Si substrate by middle frequency magnetron sputtering using Ti80Si20 composite as target. The microstructure of the deposited films was characterized by ultraviolet and visible multi-wavelength Raman spectroscope. The influence of ultraviolet light irradiation on mi-crostructure of the films was investigated by a combination of Raman and FTIR spectroscope. The mechanism of mi-crostructural evolution of the films induced by ultraviolet light irradiation was discussed. The results show that the film dominated by amorphous structure displays inclusions of trans-polyacetylene, p-phenylene vinylene and sp hy-bridized carbine carbon chains. Ultraviolet light irradiation induces the relaxation and reconstruction of microstructure in the films, which leads to the increase of Si-O and C-O bonding, and the decrease of C=C and C-H bonding. Meanwhile, the size of sp2 clusters in the films decreases and the degree of disorder of sp2 clusters increases.
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