蒸汽输运法是制备高质量且大面积均匀的 CdTe 薄膜的一种优良的方法。采用自主研发的一套蒸汽输运沉积系统制备了 CdTe 多晶薄膜,并研究了衬底温度对 CdTe 薄膜性质及太阳电池性能的影响。利用 XRD、SEM、UV-Vis和Hall等测试手段研究了衬底温度对薄膜的结构、光学性质和电学性质的影响。结果表明,蒸汽输运法制备的CdTe薄膜具有立方相结构,且沿(111)方向高度择优。随着衬底温度的升高(520℃～640℃), CdTe薄膜的平均晶粒尺寸从2mm增大到约6mm, CdTe薄膜的载流子浓度也从1.93×1010 cm–3提高到2.36×1013 cm–3,说明提高衬底温度能够降低CdTe薄膜的缺陷复合,使薄膜的p型更强。实验进一步研究了衬底温度对CdTe薄膜太阳电池性能的影响,结果表明适当提高衬底温度,能够大幅度提高电池的效率、开路电压和填充因子,但是过高的衬底温度又会降低电池的长波光谱响应,导致电池转换效率的下降。经过参数优化,在衬底温度为610℃、无背接触层小面积CdTe薄膜太阳电池的转换效率达到11.2%。
Vapor transport deposition is an excellent method for preparing large area CdTe thin films with high quality and uniformity. Polycrystalline CdTe thin films were deposited by home-made vapor transport deposition system (VTD). The effects of substrate temperature on the property of CdTe film and the performance of CdTe solar cell were inves-tigated. CdTe thin films were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), UV-Vis spectrometer, and Hall Effect system. The results show that the CdTe thin films deposited by vapor transport deposi-tion are cubic phase with a preferred orientation in (111) direction. The average grain size increases from 2mm to 6mm and the carrier concentration increases from 1.93×1010 cm–3 to 2.36×1013 cm–3 when the substrate temperature increases from 520 ℃ to 620 ℃. This suggests that high substrate temperature can increase the carrier density significantly due to the suppressed defect recombination. The performance of CdTe thin film solar cells deposited at different sub-strate temperatures demonstrates that high substrate temperature (610℃) can greatly improve the efficiency, open cir-cuit voltage and fill factor of the solar cells. But the substrate temperature higher than 610℃ will reduce the spectral response of the cells in long wavelength region, which results in the degradation of solar cell performance. The small-area CdTe thin film solar cell without back contact layer deposited at substrate temperature of 610℃ obtains the best conversion efficiency of 11.2%.
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