目的：采用多元等离子体注入与沉积( MPIIID)技术制备Ti-Al-N涂层,系统研究涂层的微观组织结构、力学性能与摩擦学特性。方法借助XRD,XPS,SEM和TEM等,观察分析Ti-Al-N涂层的微观组织结构与物相组成,采用纳米压入试验仪、布氏硬度试验仪、摩擦磨损试验仪和激光共聚焦显微镜等测试分析Ti-Al-N涂层的力学性能、膜基结合力和摩擦磨损性能。结果 Ti-Al-N涂层表现出较高的膜-基结合强度。 Al元素掺杂诱发Ti-Al-N涂层发生严重晶格畸变。当Al原子数分数为6.18%时,Ti-Al-N涂层以c-TiAlN相结构为主,表现出超高硬度(达到39.83 GPa )；随着Al 元素含量增加,涂层中的软质h-TiAlN相结构增多,硬度随之下降。摩擦试验结果表明,低Al含量Ti-Al-N涂层的抗磨损能力良好,其主要磨损机制为磨粒磨损；高Al含量Ti-Al-N涂层的抗磨损能力较差,其主要磨损机制倾向粘着磨损。结论 MPIIID技术成功实现了Ti-Al-N涂层的低温制备与成分调控,低Al含量的Ti-Al-N涂层具有优良的力学性能和优异的抗磨损能力。
ABSTRACT:Objective To investigate the microstructural, mechanical and tribological properties of the Ti-Al-N coatings synthe-sized by multi-plasma immersion ion implantation and deposition ( MPIIID) . Methods The microstructure and phase composition of the as-deposited coatings were investigated by X-ray diffraction ( XRD) , X-ray photoelectron spectroscopy ( XPS) , scanning elec-tron microscopy ( SEM) and transmission electron microscopy ( TEM) . The mechanical, bonding and tribological properties of the
as-deposited coatings were investigated using nano-indentation technology, Brinell hardness tester, friction and laser scanning con-focal microscope. Results Ti-Al-N coatings showed high adhesion strength with the substrate. Al incorporation induced a serious lattice distortion. Ti-Al-N coating with an Al content of 6. 18% was mainly composed of c-TiAlN phase and possessed a super hard-ness of about 39. 83 GPa. However, the soft h-TiAlN phase in the Ti-Al-N coating increased with the increasing Al content, which led to the continuous reduction in hardness of the Ti-Al-N coatings. Tribological test results showed that the Ti-Al-N coating with a low Al content exhibited excellent wear resistance and its wear mechanisms was defined as abrasive wear. However, the Ti-Al-N coating with a high Al content exhibited poor wear resistance and its wear mechanisms was defined as adhesive wear. Conclusion The multi-plasma immersion ion implantation and deposition ( MPIIID) technique successfully realized the low temperature deposi-tion and composition control of the Ti-Al-N coatings. Ti-Al-N coating with low Al content exhibited excellent mechanical and anti-wear properties.
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