材料期刊网

目的：提高真空镀膜机镀膜时薄膜的抗激光能力，研究镀膜机箱体内本底真空度和残余气体对激光薄膜光学性能的影响程度。方法借用一台较高配置的真空镀膜机，为了方便定性和定量的研究，可预先有针对性地设定不同的本底真空度，同时配合不同的残余气体等各种情况，来制备激光薄膜。通过对各种激光薄膜的检测，分别研究不同的设定条件对制备激光薄膜的具体影响。结果油汽在分压强1.6×10-3 Pa时对激光薄膜的抗激光损伤阀值最高；水汽的分压强越大，对激光薄膜的抗激光损伤阀值最小；当氧汽分压达到1.5×10-2 Pa时，抗激光损伤阀值开始急剧变小；在压强小于2.0×10-4 Pa的范围内，薄膜的抗激光损伤阀值随本底真空度的增大而增大；压强大于5.0×10-5 Pa时，薄膜的抗激光损伤阀值逐渐减小。结论提高真空设备的本底真空度，降低真空系统中残余气体的数量、成分及含量，尤其是H2 O和O2是提高激光薄膜光学性能关键。

ABSTRACT:Objective To study the influence of the background pressure and the residual gas in the coating crate on optical properties of the laser film so as to improve the laser resistance of thin film when using the vacuum coating machine for coating. Methods A vacuum coating equipment was borrowed for the experiment. For the convenience to conduct qualitative and quantitative study, different background pressures were preset specifically in coordination with different residual gases and other conditions to prepare the laser film. Each kind of laser film was tested to investigate the specific influence of different setting conditions on prep-aration of laser film. Results Experimental results showed that the anti-laser damage threshold of the film was the highest when the oil and gas was at a partial pressure of 1. 6×10-3 Pa. The greater the partial pressure of water vapor was, the smaller the anti-laser damage threshold of the laser film would be. When the oxygen partial pressure reached 1. 5×10-2 Pa, the anti-laser damage thresh-old began to decrease dramatically. When the pressure was less than 2. 0×10-4 Pa, the anti-laser damage threshold of the film in-creased with the increase of the background pressure. When the pressure was greater than 5. 0 × 10-5 Pa, the anti-laser damage threshold of the film gradually decreased. Conclusion Increasing the background pressure of the vacuum equipment and reducing the amount, composition and content of residual gas in the vacuum system, especially H2 O and O2 , is the key to improve the opti-cal performance of laser film.