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目的:研究微波放电法对聚二甲基硅氧烷( PDMS)材料表面的改性效果。方法利用家用微波炉的微波作用以及自制的真空罩电极装置,产生低温等离子体放电,对PDMS材料表面进行激活处理。对处理后的PDMS材料表面接触角的恢复情况以及PDMS间的键合强度进行实验测试。结果微波放电处理后的PDMS材料表面初始呈现出很强的亲水性,当微波功率为140 W,工作5 s时,PDMS表面接触角可达到10。左右;通过观察发现随着放置时间的增加,PDMS材料表面接触角逐渐增大且在10天后恢复到原始疏水角状态;同时,经过改性的PDMS样品之间可实现较好的键合封装,其最优键合条件为80℃+1.5 h压合,其键合强度可达到12.4 N。结论使用微波放电法处理PDMS材料表面,可成功地对材料进行亲水改性处理,并实现PDMS间的很好键合。与传统等离子体处理键合方法相比,该方法简单、经济且高效。

Objective To study the modification effect of microwave discharge of PDMS materials. Methods PDMS was activa-ted by the low-temperature plasma discharge produced by household microwave oven and the self-made vacuum hood electrode de-vice. The recovery of the surface contact angle and the bonding strength of the modified PDMS were experimentally tested. Results After microwave discharge treatment, the PDMS surface showed strong hydrophilicity at the beginning, when the microwave power was 140 W and the working time was 5 s, the PDMS surface contact angle could reach 10.. Through observation, it was found that with the increase of storage time, the PDMS surface contact angle increased gradually and after 10 d it returned to the original hy-drophobic angle state. At the same time, good bonding was achieved between the modified PDMS samples, and the optimal bonding condition was 80 ℃ for 1. 5 h, under this condition the bonding strength could reach 12. 4 N. Conclusion After treatment with mi-crowave discharge method, the PDMS materials surface could be successfully modified to be hydrophilic, and good bonding could be achieved between PDMS. Compared with the traditional plasma processing bonding method, this method is simple, economic and efficient.

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