在信息科技产业领域,微电子产品的多功能化、高性能化及轻薄化的发展大大推动了超高密度和超大规模集成电路关键技术及材料的发展.为了解决高密度集成所带来的信号延迟和功率损耗等问题,新一代高性能低介电甚至超低介电材料的开发成为这一领域最重要的研究方向之一.聚酰亚胺作为重要的绝缘封装材料,广泛应用于航天航空和微电子信息领域.本文综述了近年来国内外关于低介电常数聚酰亚胺薄膜的研究进展,并对未来高性能低介电聚酰亚胺材料的研究方向作了展望.
参考文献
| [1] | G.Maier.Low dielectric constant polymers for microelectronics[J].Progress in Polymer Science,20011(1):3-65. |
| [2] | Benjamin D. Hatton;Kai Landskron;William J. Hunks;Mark R. Bennett;Donna Shukaris;Douglas D. Perovic;Geoffrey A. Ozin.Materials chemistry for low-k materials[J].Materials Today,20063(3):22-31. |
| [3] | Yuekui Wang;Gotthard Seifert;Helmut Hermann.Molecular design of fullerene-based ultralow-k dielectrics[J].Physica Status Solidi, A. Applied Research,200615(15):3868-3872. |
| [4] | Zhi-Min Dang;Lan-Jie Ma;Jun-Wei Zha;Sheng-Hong Yao;Dan Xie;Qiang Chen;Xue Duan.Origin of ultralow permittivity in polyimide/mesoporous silicate nanohybrid films with high resistivity and high breakdown strength[J].Journal of Applied Physics,20094(4):044104-1-044104-6-0. |
| [5] | Yudin VE;Otaigbe JU;Gladchenko S;Olson BG;Nazarenko S;Korytkova EN;Gusarov VV.New polyimide nanocomposites based on silicate type nanotubes: Dispersion, processing and properties[J].Polymer: The International Journal for the Science and Technology of Polymers,20075(5):1306-1315. |
| [6] | Liang-You Jiang;Chyi-Ming Leu;Kung-Hwa Wei.Layered Silicates/Fluorinated Polyimide Nanocomposites for Advanced Dielectric Materials Applications[J].Advanced Materials,20026(6):426-429. |
| [7] | Jingjing Lin;Xiaodong Wang.Novel low-kappa polyimide/mesoporous silica composite films:Preparation,microstructure,and properties[J].Polymer: The International Journal for the Science and Technology of Polymers,200726(26):318-329. |
| [8] | Leu CM.;Chang YT.;Wei KH..Polyimide-side-chain tethered polyhedral oligomeric silsesquioxane nanocomposites for low-dielectric film applications[J].Chemistry of Materials,200319(19):3721-3727. |
| [9] | Yuan-Jyh Lee;Feng-Chih Chang;Shiao-Wei Kuo;Jieh-Ming Huang.Low-dielectric,nanoporous polyimide films prepared from PEO-POSS nanoparticles[J].Polymer: The International Journal for the Science and Technology of Polymers,200523(23):10056-10065. |
| [10] | Yuan-Jyh Lee;Jieh-Ming Huang;Shiao-Wei Kuo;Jian-Shing Lu;Feng-Chih Chang.Polyimide and polyhedral oligomeric silsesquioxane nanocomposites for low-dielectric applications[J].Polymer: The International Journal for the Science and Technology of Polymers,20051(1):173-181. |
| [11] | Ye YS;Chen WY;Wang YZ.Synthesis and properties of low-dielectric-constant polyimides with introduced reactive fluorine polyhedral oligomeric silsesquioxanes[J].Journal of Polymer Science, Part A. Polymer Chemistry,200618(18):5391-5402. |
| [12] | Wahab MA;Mya KY;He CB.Synthesis, morphology, and properties of hydroxyl Terminated-POSS/polyimide low-k nanocomposite films[J].Journal of Polymer Science, Part A. Polymer Chemistry,200817(17):5887-5896. |
| [13] | Ye YS;Yen YC;Chen WY;Cheng CC;Chang FC.A simple approach toward low-dielectric polyimide nanocomposites: Blending the polyimide precursor with a fluorinated polyhedral oligomeric silsesquioxane[J].Journal of Polymer Science, Part A. Polymer Chemistry,200818(18):6296-6304. |
| [14] | Subramani Devaraju;Muthukumaraswamy Rangaraj Vengatesan;Mohan Selvi.Synthesis and characterization of bisphenol-A ether diamine-based polyimide POSS nanocomposites for low K dielectric and flame-retardant applications[J].High performance polymers,20122(2):85-96. |
| [15] | Jin, Y.;Tang, J.;Hu, J.;Han, X.;Shang, Y.;Liu, H..One-step fabrication of ultralow dielectric polyimide films consisting of size-controlled mesoporous nanoparticles[J].Colloids and Surfaces, A. Physicochemical and Engineering Aspects,20111(1):178-186. |
| [16] | Wen-Cai Wang;Rohitkumar H. Vora;En-Tang Kang;Koon-Gee Neoh;Chong-Kim Ong;Lin-Feng Chen.Nanoporous Ultra-low-k Films Prepared from Fluorinated Polyiniide with Grafted Poly(acrylic acid) Side Chains[J].Advanced Materials,20041(1):54-57. |
| [17] | Elham Aram;Shahram Mehdipour-Ataei.Preparation of Thermally Stable, Low Dielectric Constant, Pyridine-Based Polyimide and Related Nanofoams[J].Journal of Applied Polymer Science,20136(6):4387-4394. |
| [18] | Yiwang Chen;Wencai Wang;Weihong Yu;Zeliang Yuan;En-Tang Kang;Koon-Gee Neoh;Berit Krauter;Andreas Greiner.Nanoporous Low-κ Polyimide Films via Poly(amic acid)s with Grafted Poly(ethylene glycol) Side Chains from a Reversible Addition-Fragmentation Chain-Transfer-Mediated Process[J].Advanced functional materials,20045(5):471-478. |
| [19] | G.D.Fu;B.Y.Zong;E.T.Kang.Nanoporous Low-Dielectric Constant Polyimide Films via Poly(amic acid)s with RAFT-Graft Copolymerized Methyl Methacrylate Side Chains[J].Industrial & Engineering Chemistry Research,200421(21):6723-6730. |
| [20] | Fu GD;Kang ET;Neoh KG;Lin CC;Liaw DJ.Rigid fluorinated polyimides with well-defined polystyrene/poly(pentafluoro styrene) side chains from atom transfer radical polymerization[J].Macromolecules,200518(18):7593-7600. |
| [21] | Wang, Q.;Wang, C.;Wang, T..Controllable low dielectric porous polyimide films templated by silica microspheres: Microstructure, formation mechanism, and properties[J].Journal of Colloid and Interface Science,2013:99-105. |
| [22] | Zhang, Y.;Yu, L.;Su, Q.;Zheng, H.;Huang, H.;Chan, H.L.W..Fluorinated polyimide-silica films with low permittivity and low dielectric loss[J].Journal of Materials Science,20124(4):1958-1963. |
| [23] | Stefan Chisca;Ion Sava;Maria Bruma.Porous polyimide films obtained by using lithium chloride as pore-forming agent[J].Polymer international,201311(11):1634-1643. |
| [24] | Fei Chen;Debaditya Bera;Susanta Banerjee;Seema Agarwal.Low dielectric constant polyimide nanomats by electrospinning[J].Polymers for advanced technologies,20126(6):951-957. |
| [25] | Hongyan Yao;Yunhe Zhang;Yu Liu;Kaiyuan You;Shanyou Liu;Baijun Liu;Shaowei Guan.Synthesis and Properties of Cross-Linkable High Molecular Weight Fluorinated Copolyimides[J].Journal of Polymer Science, Part A. Polymer Chemistry,20143(3):349-359. |
| [26] | Yuan Y;Lin BP;Zhang XQ;Wu LW;Zhan Y.Nonfluorinated copolymerized polyimide thin films with ultralow dielectric constants[J].Journal of Applied Polymer Science,20083(3):1515-1519. |
| [27] | Lee CW;Kwak SM;Yoon TH.Synthesis and characterization of polyimides from bis (3-aminophenyl)-2,3,5,6-tetrafluoro-4-trifluoromethylphenyl phosphine oxide (mDA7FPPO)[J].Polymer: The International Journal for the Science and Technology of Polymers,200611(11):4140-4147. |
| [28] | Zhao XJ;Liu JG;Rui JM;Fan L;Yang SY.Synthesis and characterization of organosoluble polyfluorinated polyimides derived from 3,3 ',5,5 '-tetrafluoro-4,4 '-diaminodiphenylmethane and various aromatic dianhydrides[J].Journal of Applied Polymer Science,20073(3):1442-1449. |
| [29] | Lee DH.;Koo SY.;Lee HS.;Kim WS.;Min KE.;Park LS.;Seo KH.;Kang IK. Choi HJ..Preparation and properties of aromatic polyimides based on 4,4 '-(2.2,2-trifluoro-1-phenylethylidene)diphthalic anhydride[J].Journal of Applied Polymer Science,20021(1):38-44. |
| [30] | Myung BY.;Kim JJ.;Yoon TH..Synthesis and characterization of novel 3,6-di[3 ',5 '-bis(trifluoromethyl)phenyl]pyromellitic dianhydride for polyimide synthesis[J].Journal of Polymer Science, Part A. Polymer Chemistry,200223(23):4217-4227. |
| [31] | Yang CP.;Chen RS.;Chen KH..Effects of diamines and their fluorinated groups on the color lightness and preparation of organosoluble aromatic polyimides from 2,2-bis[4-(4-amino-2-trifluoromethylphenoxy) phenyl]-hexafluoropropane[J].Journal of Polymer Science, Part A. Polymer Chemistry,20037(7):922-938. |
| [32] | Yang SY;Ge ZY;Yin DX;Liu JG;Li YF;Fan L.Synthesis and characterization of novel fluorinated polyimides derived from 4,4 '-[2,2,2-trifluoro-1-(3-trifluoromethylphenyl)ethylidene] diphthalic anhydride and aromatic diamines[J].Journal of Polymer Science, Part A. Polymer Chemistry,200417(17):4143-4152. |
| [33] | Jang W;Shin D;Choi S;Park S;Han H.Effects of internal linkage groups of fluorinated diamine on the optical and dielectric properties of polyimide thin films[J].Polymer: The International Journal for the Science and Technology of Polymers,20077(7):2130-2143. |
| [34] | Tao Ma;Shujiang Zhang;Yanfeng Li.Synthesis and characterization of soluble polyimides based on a new fluorinated diamine: 4-Phenyl-2,6-bis[3-(4'-amino-2'-trifluoromethyl-phenoxy) phenyl] pyridine[J].Journal of Fluorine Chemistry,20106(6):724-730. |
| [35] | Dumitru Popovici;Camelia Hulubei;Vasile Cozan.Polyimides containing cycloaliphatic segments for low dielectric material[J].High performance polymers,20123(3):194-199. |
| [36] | Chern YT.;Shiue HC..LOW DIELECTRIC CONSTANTS OF SOLUBLE POLYIMIDES DERIVED FROM THE NOVEL 4,9-BIS[4-(4-AMINOPHENOXY)PHENYL]DIAMANTANE[J].Macromolecules,199719(19):5766-5772. |
| [37] | Chern YT.;Shiue HC..LOW DIELECTRIC CONSTANTS OF SOLUBLE POLYIMIDES BASED ON ADAMANTANE[J].Macromolecules,199716(16):4646-4651. |
| [38] | Chern YT..Low dielectric constant polyimides derived from novel 1,6-bis[4-(4-aminophenoxy)phenyl]diamantane[J].Macromolecules,199817(17):5837-5844. |
| [39] | Chern YT.;Huang CM..Synthesis and characterization of new polyimides derived from 4,9-diaminodiamantane[J].Polymer: The International Journal for the Science and Technology of Polymers,199825(25):6643-6648. |
| [40] | Chern YT.;Shiue HC..High subglass transition temperatures and low dielectric constants of polyimides derived from 4,9-bis(4-aminophenyl)diamantane[J].Chemistry of Materials,19981(1):210-216. |
| [41] | Chern YT.;Shiue HC..Low dielectric constant polyimides derived from 1,3-bis(4-aminophenyl)adamantane[J].Macromolecular chemistry and physics,19986(6):963-969. |
| [42] | Chern, YT;Wang, JJ.Hydrolytic Stability and High T-g of Polyimides Derived from the Novel 4,9-Bis[4-(3,4-dicarboxyphenoxy)phenyl]-diamantane Dianhydride[J].Journal of Polymer Science. Part A, Polymer Chemistry,20096(6):1673-1684. |
| [43] | Wang Chun-Shan.Synthesis and characterization of polyimides containing naphthalene pendant group and flexible ether linkages[J].Polymer: The International Journal for the Science and Technology of Polymers,200010(10):3581-3591. |
| [44] | Liaw DJ.;Tseng WT..New organosoluble polyimides with low dielectric constants derived from bis[4-(2-trifluoromethyl-4-aminophenoxy)phenyl] diphenylmethylene[J].Macromolecular symposia,20030(0):351-362. |
| [45] | Yang CP;Chiang HC.Organosoluble and light-colored fluorinated polyimides based on 9,9-bis[4-(4-amino-2-trifluoromethylphenoxy)phenyl]fluorene and aromatic dianhydrides[J].Colloid and polymer science,200412(12):1347-1358. |
| [46] | Yang CP;Su YY;Wu KL.Synthesis and properties of new aromatic polyimides based on 2(')5-bis(4-amino-2-trifluoromethylphenoxy)-tert-butylbenzene and various aromatic dianhydrides[J].Journal of Polymer Science, Part A. Polymer Chemistry,200421(21):5424-5438. |
| [47] | Chern YT;Tsai JY.Low Dielectric Constant and High Organosolubility of Novel Polyimide Derived from Unsymmetric 1,4-Bis(4-aminophenoxy)-2,6-di-tert-butylbenzene[J].Macromolecules,200824(24):9556-9564. |
| [48] | Chern, YT;Twu, JT;Chen, JC.High Tg and high organosolubility of novel polyimides containing twisted structures derived from 4-(4-amino-2-chlorophenyl)-1-(4-aminophenoxy)-2,6-di-tert-butylbenzene[J].European Polymer Journal,20094(4):1127-1138. |
| [49] | Chen-Yi Wang;Hui-Peng Zhao;Guang Li;Jian-Ming Jiang.Novel fluorinated polyimides derived from an unsymmetrical diamine containing trifluoromethyl and methyl pendant groups[J].Polymers for advanced technologies,201112(12):1816-1823. |
| [50] | Yiwu Liu;Yi Zhang;Qi Lan.High-Performance Functional Polyimides Containing Rigid Nonplanar Conjugated Triphenylethylene Moieties[J].Chemistry of Materials: A Publication of the American Chemistry Society,20126(6):1212-1222. |
| [51] | Liu, Y.;Zhang, Y.;Lan, Q.;Qin, Z.;Liu, S.;Zhao, C.;Chi, Z.;Xu, J..Synthesis and properties of high-performance functional polyimides containing rigid nonplanar conjugated tetraphenylethylene moieties[J].Journal of Polymer Science, Part A. Polymer Chemistry,20136(6):1302-1314. |
| [52] | Kwang un Jeong.Synthesis and characterization of novel polyimide from bis-(3-aminophenyl)-4-(trifluoromethyl)phenyl phosphine oxide[J].Journal of Polymer Science, Part A. Polymer Chemistry,200119(19):3335-3347. |
| [53] | Susanta Banerjee;Mukesh K. Madhra;Arun K. Salunke;Devendra K. Jaiswal.Synthesis and properties of fluorinated polyimides. 3. Derived from novel 1,3-bis[3'-trifluoromethyl-4'(4''-amino benzoxy) benzyl] benzene and 4,4-bis[3'-trifluoromethyl-4'(4-amino benzoxyl) benzyl] biphenyl[J].Polymer: The International Journal for the Science and Technology of Polymers,20033(3):613-622. |
| [54] | Hsiao SH.;Chang YH..Synthesis and properties of soluble trifluoromethy-substituted polyimides containing laterally attached p-terphenyls[J].Journal of Polymer Science, Part A. Polymer Chemistry,20045(5):1255-1271. |
| [55] | Yasufumi Watanabe;Yuji Shibasaki;Shinji Ando;Mitsuru Ueda.Synthesis and characterization of polyimides with low dielectric constants from aromatic dianhydrides and aromatic diamine containing phenylene ether unit[J].Polymer: The International Journal for the Science and Technology of Polymers,200516(16):5903-5908. |
| [56] | Z.G.Qian;Z.Y.Ge;M.H.He;J.G.Liu;L.Fan;S.Y.Yang;Z.Z.Pang.Synthesis and characterization of new inherent photoimageable polyimides based on fluorinated tetramethyl-substituted diphenylmethanediamines[J].Polymer: The International Journal for the Science and Technology of Polymers,200222(22):6057-6063. |
| [57] | Qian ZG.;Pang ZZ.;Li ZX.;He MH.;Liu JG.;Fan L.;Yang SY..Photoimageable polyimides derived from alpha,alpha-(4-amino-3,5-dimethylphenyl) phenyl methane and aromatic dianhydride[J].Journal of Polymer Science, Part A. Polymer Chemistry,200217(17):3012-3020. |
| [58] | Li HS;Liu JG;Rui JM;Fan L;Yang SY.Synthesis and characterization of novel fluorinated aromatic polyimides derived from 1,1-bis(4-amino-3,5-dimethylphenyl)-1-(3,5-ditrif luoromethylphenyl)-2,2,2-trifluoroethane and various aromatic dianhydrides[J].Journal of Polymer Science, Part A. Polymer Chemistry,20068(8):2665-2674. |
| [59] | Sang Il Kim;Tae Joo Shin;Moonhor Ree;Gil Tae Hwang;Byeang Hyean Kim;Haksoo Han;Jongchul Seo.Synthesis and Characterization of New Polyimides Containing Calix[4]arenes in the Polymer Backbone[J].Journal of Polymer Science, Part A. Polymer Chemistry,199913(13):2013-2026. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%