基于多场耦合的旋转圆盘电极法研究酸性镀铜

电镀与涂饰 , 2017, 36(9): 437-1. doi: 10.19289/j.1004-227x.2017.09.001

基于多场耦合的旋转圆盘电极法研究酸性镀铜

冀林仙 ^1, , 聂合贤 ^2, , 苏世栋 ^3, , 陈苑明 ^4, , 何为 ^5,

1.运城学院,山西运城,044000

2.运城学院,山西运城,044000

3.运城学院,山西运城,044000

4.电子科技大学,四川成都,610000

5.电子科技大学,四川成都,610000

基金项目: 运城学院院级项目(CY-2016005,YQ-2016016)

关键词：酸性镀铜 , 旋转圆盘电极 , 多物理场耦合 , 电流密度分布 , 厚度均匀性 , 数值模拟

Study of acidic copper electrodeposition using rotating disk electrode based on multi-physics coupling

Keywords： acidic coper electroplating , rotating disk electrode , multi-physics coupling , current density distribution , thickness uniformity , numerical stimulation

采用多物理场耦合方法建立了旋转圆盘电极(RDE)电镀酸铜的模型,分析了电解池内不同RDE转速下的流场分布与扩散层分布特征,探讨了镀铜过程中RDE的转速及尺寸对电极表面电流密度与镀层厚度分布的影响,为电镀件表面电流密度分布和镀层厚度均匀性的研究提供理论指导.

A model for acidic copper electrodeposition on rotating disk electrode (RDE) was established based on multi-physics coupling method.The characteristics of flow field distribution and diffusion layer distribution at different rotating speeds of RDE in electrolytic bath were analyzed.The effects of rotating speed and size of RDE on distribution of current density and coating thickness were discussed.The results provide a theoretical guidance for the study of current density distribution and coating thickness uniformity on the electrodeposited object.

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