采用W18Cr4V高速钢进行离子渗氮-PECVD TiN复合处理运用透射电子显微镜、X射线衍射仪和光学显微镜研究试样的表层组织结构.采用连续压入法研究TiN膜与基体的结合强度.结果表明,离子渗氮能够提高膜基结合强度通过分析渗氮层与膜-基界面的组织特点,认为TiN膜在渗氮层上一些与其具有相同或相似晶体结构的氮化物上外延生长,以及强度较高的渗氮层对膜的支撑是基体渗氮提高膜-基结合强度的两大因素.
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