讨论了Ta表面等离子体渗氮的热力学问题,将超平衡氢和非平衡热力学的反应耦合理论引入离子渗氮反应的计算,从理论上解释了等离子体和氢在Ta表面渗氮过程中的作用.给出了渗氮条件下的Ta-N-O非平衡定态相图,与实验验结果符合得较好.实验表明,氢和等离子体的存在,有利于提高氮原子的活度,促进热力学上不稳定的Ta的氮化物的形成,抑制粗糙的Ta的氧化物的形成.
参考文献
| [1] | Zhang D Y, Li F, Luo W, Cai L, Xu L P, Lin Q. Chin J Nonferrous Metals, 2000; 10:189(张德元,李放,罗文,蔡莉,许兰萍,林勤.中国有色金属学报,2000;10:189) |
| [2] | Prigogine I. Introduction to Thermodynamics of Irreversible Process, 3rd Ed. New York: Interscience Pub,1967 |
| [3] | Spitsyn B V, Derjaguin D B. Sci Am, 1975; 233:102 |
| [4] | Spitsyn B V, Builov L L, Derjaguin D B. J Cryst Growth,1981;52:219 |
| [5] | Babad zahaknibin A A ed, Li F Z trans. Electrochemical Heat Treatment with Glow Discharge. Beijing: Machinery Industry Press, 1985:17(Babad zahaknibin A A著,李凤照译.辉光放电化学热处理.北京:机械工业出版社,1985:17) |
| [6] | Wang J T, Carlsson J O. Surf Coat Technol, 1990; 43/44:1 |
| [7] | Wang J T, Zhang P T, Yang Q H. In: Ravi K V, Dismukes J P eds, Diamond Materials IV, NJ: The Electrochem Soc Inc Pennington, 1995; PV 95-4:13 |
| [8] | Zhang D Y, Li Q, Zeng W J, Li F, Lu D P. Proc 1st Inter Conf on Mechan Eng, Shanghai: 2000; 18-22:601 |
| [9] | Zhang D Y, Li Q, Zeng W J, Li F, Xu L P Fu Q F. Trans Nonferrous Met Soc Chin, 2001; 11:281 |
| [10] | Qiao Z Y, Xu Z H, Liu H L, Computerized Physical Chemistry of Materials and Metallurgy. Beijing: Metallurgy Industry Press, 1999:142(乔芝郁,许志宏,刘洪霖.冶金和材料计算物理化学.北京:冶金工业出版社1999:142) |
| [11] | Zhang D Y, Zeng W J, Fu Q F, Li F, Lin Q, Luo W. Trans Mater Heat Treatment, 2001; 22(2): 48(张德元,曾卫军,付青峰,李放,林勤,罗文.材料热处理学报,2001;22(2):48) |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%