研究了ZAO透明导电薄膜的微观组织结构、化学成分及其电学光学特性.结果表明,多晶ZAO薄膜呈柱状晶并具有(002)面择优取向,c轴晶格常数大于0.52000 nm;ZAO薄膜不同微区之间的成分不均匀导致了电学性能的不均匀;ZAO薄膜的电阻率和在可见光区的平均透射率分别为1.39×10-4Ω.cm和80.8%,其透射率和吸收率曲线均具有明显的波动性,该波动性影响以ZAO为阳极的有机发光二极管的发射光谱,在5.38 A/m2电流密度下二极管的发光效率大于2 cd/A.
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