用反应磁控溅射的方法制备了MgO薄膜.基于原子力显微镜观测,并借助Fourier变换,计算了薄膜表面形貌的分形维数.发现分形维数变化对应于薄膜溅射模式的变化,二者之间有相关性氧分压30%的分形维数是一个临界点.分形维数若发生明显跌落,意味着溅射模式发生变化.界于临界值两侧的分形维数,分别对应两种截然不同的溅射模式.与临界值对应的溅射状态则处于金属模式和氧化物模式的混和状态.
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