用薄膜内耗仪测定薄膜应力

1.上海宝山钢铁股份公司分析技术中心,上海,201900

2.Department of Materials, University of Maryland, MD 20742-2115, USA

AN APPROACH TO MEASURING STRESS OF THIN FILM ON Si CANTILEVER BY CARRIER FREQUENCY

采用一种新的薄膜内耗仪观测Ni50Ti50薄膜样品的形变(薄膜形变造成薄膜与载膜硅片之间的界面应力)随温度或其它环境参量的变化.同步测量了薄膜的内耗、动态模量、薄膜应力以及Ni50Ti50薄膜的相变过程.

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