提出了-种基于离散小波变换和分形几何概念定量描述薄膜表面形貌各向异性的新方法,并据此研究了磁控溅射Cu-W薄膜表面结构特征随退火温度的演变.结果表明,薄膜表面聚合过程有两个不同阶段:孔洞处形核和颗粒生长;薄膜表面形貌分形维数可很好地描述表面粗化程度.研究发现,表面形貌各向异性变化趋势对相结构变化敏感.指出这种结合小波变换和分形几何概念表征薄膜表面形貌的方法,可以较灵敏地探测到Cu-W薄膜表面结构各向异性变化.
参考文献
| [1] | McRae G A, Maguire M A, Jeffrey C A, Guzonas D A,Brown C A. Appl Surf Sci, 2002; 191:94 |
| [2] | Ming Q Z, Zai P L, Klaus F. Tribology Int, 1997; 30:87 |
| [3] | Jong C A, Chin T S. Mater Chem Phys, 2002; 74:2019 |
| [4] | Vladimir I. Trofimov, Thin Solid Films, 2003; 428:56 |
| [5] | Tersio G, Souza C, Kleinke M U, Gorenstein A. Appl Phys Lett, 2002; 81(26): 4922 |
| [6] | Erlebacher J, Aziz M J, Chason E, Sinclair M.B, Floro J A. Phys Rev Lett, 1999; 82:2330 |
| [7] | Barabasi A L, Stanly H E. Fractal Concepts in Surface Growth. Cambridge: Cambridge University Press, 1995 |
| [8] | Leamy H J, Dirks A G. J Appl Phys, 1978; 49:3430 |
| [9] | Engelhardt M A, Jaswal S S, Sellmyer D J. Phys Rev B,1991; 44(23): 12671 |
| [10] | Lokenath Debnath. Wavelet Transforms and Their Applications. New York: Birkhauser Boston, 2002 |
| [11] | Raja J, Muralikrishnan B, Fu S Y. Precis Eng, 2002; 26:222 |
| [12] | Stephane G. Mallat. IEEE Transactions on Pattern Analysis and Machine Intelligence, 1989; 11(7): 674 |
| [13] | Wang Y, Xu K W. Acta Phys Sin, 2004; 53(3): 900(汪渊, 徐可为. 物理学报, 2004; 53(3): 900) |
| [14] | Grzeta B, Radic N, Gracin D, Doslic T, Car T. J NonCryst Solids, 1994; 170:101 |
| [15] | Dirks A G, van den Broek J J. J Vac Sci Technol A, 1985;3(6): 2618 |
| [16] | Lu W, Komvopoulos K. Appl Phys Lett, 2000; 76:3206 |
| [17] | Nastasi M, Saris F W, Hung L S, Mayer J W. J Appl Phys,1995; 58(8): 3052 |
| [18] | Ozakan Cengiz S, Nix William D, Gao H J. J Mater Res,1999; 14(8): 3247 |
| [19] | Zinke-Allmang M. Thin Solid Films, 1999; 346: 1 |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%