采用电解液微弧碳氮化技术(PECN),在纯钛试样表面沉积出较厚且与基体结合牢固的多孔纳米Ti(CxN1-)改性层,研究了改性层结构和组成随PECN处理时间的演变规律.结果表明:随放电处理时间延长,PECN-Ti(CxN1-)膜层厚度,膜层中C/N的原子比以及微孔直径皆增加.处理150 min时,Ti(CxN1-x)膜层厚度可达15 μm,且膜层是由晶粒尺寸为40-60 nm的纳米晶粒组成.处理过程中有氢渗入,并在Ti(CxN1-x)层下面形成富含TiH2的过渡层.后期的真空退火处理可以将氢除去使TiH2完全分解,而不影响表面Ti(CxN1-x)膜的成分和形貌.
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