Al薄膜纳米压痕过程的多尺度模拟

金属学报, 2009, 45(2): 129-136. doi: 10.3321/j.issn:0412-1961.2009.02.001

Al薄膜纳米压痕过程的多尺度模拟

黎军顽 ^1, , 倪玉山 ^2, , 林逸汉 ^3, , 罗诚 ^4, , 江五贵 ^5,

基金项目: 国家自然科学基金(10576010)

MULTISCALE SIMULATION OF NANOINDENTATION ON Al THIN FILM

采用多尺度准连续介质法分别模拟无缺陷和具有初始缺陷两种状态下,单晶Al薄膜纳米压痕初始塑性变形过程,得到载荷-位移响应曲线和应变能-位移变化曲线.研究了初始缺陷对纳米压痕过程中位错形核与发射、Peierls应力以及位错发射.临界载荷的影响.结果表明,在整个纳米压痕过程中出现了多次位错形核与发射现象,初始缺陷对第1和第3对位错的形核与发射影响较小,而对第2对位错的形核与发射具有明显的推迟作用,并伴随有裂纹扩展现象;由于初始缺陷引起薄膜材料内部严重的晶格畸变,导致系统应变能和位错运动的Peierls应力增加;裂纹扩展前,发射第2对位错需要的临界载荷增加,裂纹失稳后,位错发射需要的临界载荷下降.模拟获得的纳米硬度和Peierls应力与实验结果吻合.

参考文献

[1]	Oliver W C,Pharr G M.J Mater Res,1992; 7:1564
[2]	Li X D,Bhnshan B.Mater Charaet,2002; 48:11
[3]	Bamber M J,Cooke K E,Mann A B,Derby B.Thin Solid Films,2001; 399:299
[4]	Bhushan B,Koinkar V N.Appl Phys Lett,1994; 64:1653
[5]	Chen J,Bull S J.Thin Solid Films,2006; 494:1
[6]	Sangwal K,Gorostiza P,Sanz F.Surf Sci,2000; 446:314
[7]	Zimmerman J A,Kelchner C L,Klein P A,Hamilton J C,Foiles S M.Phys Rev Lett,2001; 87:165507
[8]	Shankar R M.Appl Phys Lett,2007; 90:171924
[9]	Kiely J D,Hwang R Q,Houston J E.Phys Rev Lett,1998;81:4424
[10]	Yang B,Vehoff H.Acta Mater,2007; 55:849
[11]	Soifer Y M,Verdyan A,Kazakevich M,Rabkin E.Scr Mater,2002; 47:799
[12]	Liu Y,Varghese S,Ma.J,Ycehino M,Lu H,Komanduri R.Int J Plast,2008; 24:1990
[13]	Kiely J D,Houston J E.Phys Rev,1998; 19B:12588
[14]	Phillips R,Rodney D,Shenoy V,Tadmor E,Ortiz M.Modell Simul Mater Sci Eng,1999; 7:769
[15]	Shenoy V B,Phillips R,Tadmor E B.J Mech Phys Solids,2000; 48:649
[16]	Ni Y S,Wang H T.Chin Q Mech,2005; 26:366(倪玉山,王华滔.力学季刊,2005;26:366)
[17]	Tadmor E B,Miller R,Phillips R.J Mater Re.s,1999; 14:2233
[18]	Shah D,Yuan L,Guo B.Mater Sci Eng,2005; A412:264
[19]	Iglesias R A,Leiva E P.Acta Mater,2006; 54:2655
[20]	Li J W,Jiang W G.Acta Metall Sin,2007; 43:851(黎军顽,江五贵.金属学报,2007;43:851)
[21]	Jiang W G,Li J W,Su J J,Tang J L.Acta Mech Solida Sin,2007; 28:375(江五贵,黎军顽,苏建君,汤井伦.固体力学学报,2007;28:375)
[22]	Ni Y S,Wang H T.Chin J Mech Eng,2007; 43:101(倪玉山,王华滔.机械工程学报,2007;43:101)
[23]	Tadmor E B,Hal S.J Mech Phys Solids,2003; 51:765
[24]	Miller R,Ortiz M,Phillips R,Shenoy V,Tadmor E B.Eng Fract Mech,1998; 61:427
[25]	Gannepalli A,Mallapragada S K.Phys Rev,2002; 66B:104103
[26]	Jarausch K F,Kiely J D,Houston J E,Russell P E.J Mater Res,2000; 15:1693
[27]	Smith R,Christopher D,Kenny S D,Richter A,Wolf B.Phys Rev,2003; 67B:245405
[28]	Van Vliet K J,Li J,Zhu T,Choi Y J,Yip S,Suresh S.Solid Mech Its Appl,2004; 115:203
[29]	Kelchner C L,Plimpton S J,Hamilton J C.Phys Rev,1998; 58B:11085
[30]	Tadmor E B.PhD Thesis,Brown University,Providence,Rhode Island,1996
[31]	Tadmor E B,Ortiz M,Phillips R.Philos Mag,1996; 73A:1529
[32]	Tadmor E B,Phillips R,Ortiz M.Langmuir,1996; 12:4529
[33]	Shenoy V B,Miller R,Tadmor E B,Rodney D,Phillips R,Ortiz M.J Mech Phys Solids,1999; 47:611
[34]	Ercolessi F,Adams J B.Europhys Lett,1994; 28:538
[35]	Minor A M,Lilleodden E T,Stach E A,Morris J W.J Mater Res,2004; 19:176
[36]	Hirth J P,Lothe J.Theory of Dislocations.New York:John Wiley and Sons,1982:757
[37]	Kceugi T,Kino T.Mater Sci Eng,1993; A164:368

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Al薄膜纳米压痕过程的多尺度模拟

MULTISCALE SIMULATION OF NANOINDENTATION ON Al THIN FILM

参考文献