用FTIR分析, 结合DSC、XRD、AFM实验结果，展示了sol-gel法制备 BaxSr1-xTiO3(BST)薄膜热演化过程的化学机制. 研究表明：螯合剂HAcAc的引入减缓钛醇盐水解速率、改善晶化途径、降低结晶起始温度，从而制得了晶化完善、致密无裂纹的BST薄膜.
FTIR analysis combined with DSC, XRD and AFM experiments was used to study on the chemical mechanism of thermal evolution for BaxSr1-xTiO3 (BST) thin films derived by sol-gel method. Acetylacetone(HAcAc) was introduced as a chelating agent to reduce a rapid hydrolysis rate of Ti-alkoxide, to improve its crystallization path, to decrease its 奵rystallization temperature. And then the densified and crack-free BST thin films with better crystallization were fabricated.
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