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用甲基三乙氧基硅烷(MTES)代替部分正硅酸乙酯(TEOS)作为前驱物,通过共水解缩聚反应可制得甲基修饰的二氧化硅膜.通过TGA、FTIR以及气体渗透等测试手段对甲基修饰的SiO2膜进行研究,发现随着MTES/TEOS摩尔比例的增大,二氧化硅膜的憎水性能逐渐增强,当MTES/TEOS达到0.8时,二氧化硅膜的孔表面几乎不再吸附水气.氢气在MTES/TEOS为1的支撑体二氧化硅膜的输运受温度的控制,200℃时H2的渗透率达到6.0×10-7mol·m-2·Pa-1·s-1,H2/CO2分离系数达到6.0,于200℃以及水蒸气压力为3564Pa的环境中陈化近110h后H2渗透率基本保持不变,H2/CO2分离系数有所增大,说明经过甲基修饰的二氧化硅膜比纯二氧化硅膜具有更好的水热稳定性.

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