多孔硅以其多孔结构及大的表面体积比等特点被认为是可在基于MEMS技术的微型燃料电池中代替碳纸、碳布作为扩散层的材料.本文考虑传统碳纸、碳布作为扩散层的要求,并结合多孔硅材料的特点,选用n〈100〉(0.04～0.15Ω·cm)单晶硅进行了多孔硅制备工艺的研究;考察了腐蚀液的浓度、电流密度和氧化处理时间对多孔硅的孔隙率、孔深度及氧化速率的影响,实现了多孔硅的可控制备.孔隙率为40%、孔径为350～700nm、厚度为60μm的多孔硅膜电极经循环伏安测定,在0.5mol/L H2SO4溶液中,表现出与碳纸相近的电活性,显示了潜在的应用价值.
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