用溶胶-凝胶法在Pt/Ti/SiO2/Si衬底上制备了系列Mn-Mg共掺杂的钛酸锶钡(Ba0.25Sr0.75TiO3)薄膜.X射线衍射以及场发射扫描电镜分析表明:薄膜为钙钛矿结构且无杂相生成,薄膜表面晶粒均匀、无裂纹.测试了不同浓度掺杂薄膜的介电性能,掺杂浓度为1mol%时,薄膜的介电常数、损耗、可调性和漏电流密度分别为200、0.010、38%、1×10-5 A/cm2.性能改善后的薄膜材料可以用来制作微波可调器件.
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