考察了TiN/Ti多层膜调制比对其摩擦磨损行为的影响.采用磁过滤阴极弧沉积的方法制备了具有不同调制比的TiN/Ti多层膜,用扫描电镜和透射电镜对其层状结构及子层结构进行了观察和分析.用纳米压痕和SRV摩擦磨损试验的方法,对多层膜进行了纳米硬度和弹性模量测试以及摩擦磨损实验.结果表明,所制备的TiN/Ti多层膜层状结构清晰,与基底结合良好,调制比对多层膜的硬度和磨损特性影响较大,而对摩擦系数的影响却小明显.结合实验结果,讨论了硬度与弹性模量的比值(H/E值)对TiN/Ti多层膜耐磨性的影响.
参考文献
| [1] | 于翔,王成彪,刘阳,等.金属学报,2006,42(6):662-666. |
| [2] | 刘元富,张谷令,王久丽,等.物理学报,2004,53(2):503-507. |
| [3] | Holleck H,Schier V.Surface and Coatings Technology,1995,76-77:328-336. |
| [4] | Bull S J,Jones A M.Surface and Coatings Technology,1996,78:173-184. |
| [5] | 李谋,李晓娜,林国强,等.材料热处理学报,2005,26:49-52. |
| [6] | 李戈扬,施晓蓉,张流强,等.上海交通大学学报,1999,33(2):159-161. |
| [7] | 赖倩茜,虞晓江,戴嘉维,等.真空科学与技术,2002,22(4):313-316. |
| [8] | Dheepa Srinivasana,Trupti G Kulkarnib,Anand K.Tri-bology International,2007,40 (2):266-277. |
| [9] | 赵彦辉,林国强,李晓娜,等.金属学报,2005,41(10):1106-1110. |
| [10] | Voevodin A A,Iarve E V,Ragland W,et al.Surface and Coatings Technology,2001,148:38-45. |
| [11] | 刘成龙,林国强,杨大智,等(LIU Cheng-Liong,et al).无机材料学报(Journal of Inorganic Materials),2005,20(4):940-1946. |
| [12] | Simmonds M C,van Swygenhovena H,Pfliigerb E,et al.Surface and Coatings Technology,1997,94-95:490-494. |
| [13] | Mats Larsson,Michael Bromark,Per Hedenqvist,et al.Surface and Coatings Technology,1995,76-77:202-205. |
| [14] | 赵阳,王娟,徐晓明,等.金属学报,2006,42(4):389-393. |
| [15] | Ghosha S K,Limayeb P K,Swainc P B,et al.Surface and Coatings Technology,2007,201:4609-4618. |
| [16] | Lewis D B,Donohue L A,Lembke M,et al.Surface and Coatings Technology,1999,114:187-199. |
| [17] | Leyland A,Matthews A.Wear,2000,246:1-11. |
| [18] | Leyland A,Matthews A.Surface and Coatings Technol-ogy,2004,177-178:317-324. |
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