将水热合成的羟基磷灰石(HA)粉与20wt%Ti粉混合,冷压烧结成靶材.采用射频磁控溅射方法,在工业纯钛基体上沉积TiO2/HA生物薄膜,通过扫描电镜(SEM)及其能谱(EDS)、X射线衍射(XRD)和差热分析仪(TDA)对膜层进行了表征,探讨了溅射膜的晶化工艺.结果表明:由于选择溅射和OH-损失,溅射膜由TiO2晶体颗粒和非晶钙磷化合物组成,且其Ca/P比降低.经700℃,0.5 h水蒸气处理,非晶钙磷化合物结晶度大大提高,并部分转化为HA晶体,且处理后的溅射膜与基体间无裂纹.
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