采用多弧-磁控溅射镀膜机在不锈钢2Cr13衬底上沉积CNx/TiN多层复合涂层.利用光电子能谱仪(XPS)和透射电子衍射(TED)对涂层的组成和结构进行分析.利用自行研制的高压水蚀试验装置对不锈钢、高铬铸铁、司太立合金以及CNx/TiN多层复合涂层的抗水蚀性能进行对比试验,最后对涂层的水蚀失效机理进行了探讨.试验结果表明:CNx/TiN多层复合涂层具有较高的硬度、附着力、抗热冲击性能以及优异的抗水蚀性能,是一种优良的汽轮机末级叶片抗水蚀用涂层.
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