用溶胶-凝胶法在Pt/Ti/SiO2/Si(100)基片上制备了近等原子比的压电PZT薄膜.在准同型相界附近的PZT薄膜的应变机制是受极化控制的压电效应,内电场导致薄膜的自发极化定向,使薄膜未经极化就具有明显的压电响应.
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