应用氧离子束辅助准分子脉冲激光沉积薄膜技术,先在NiCr合金(Hastelloy c-275)基底上在室温下淀积具有平面织构的钇稳锆(YSZ)缓冲层薄膜,再在YSZ/NiCr基底上在750℃下制备具有平面织构和高临界电流密度的YBa2Cu3O7-x(YBCO)薄膜.YSZ和YBCO薄膜都为c-轴取向和平面织构的,YSZ(202)和YBCO(103)的X射线扫描衍射峰的全宽半峰值分别为18°和11°.YBCO薄膜的临界温度和临界电流密度分别为90K(R=0)和7.9×105A/cm2(77K,零磁场).
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