介绍了一种新型的磁控/流体动力学控制的大口径长通道直流电弧等离子体炬,并据此设计建造了100千瓦级高功率DC Arc Plasma Jet CVD金刚石膜沉积系统.讨论了该系统采用的半封闭式气体循环系统的工作原理,以及在气体循环条件下制备大面积高光学质量金刚石自支撑膜的研究结果.
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